Nano Science and Technology Institute
Nanotech 2005 Vol. 3
Nanotech 2005 Vol. 3
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 3
Chapter 7: Smart Sensors and Systems

Active Damping Control in MEMS Using Parametric Pumping

Authors:B.J. Gallacher, J.S. Burdess, A.J. Harris and K.M. Harish
Affilation:Newcastle University, UK
Pages:383 - 386
Note:This paper is not yet available for online viewing
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