Nano Science and Technology Institute
Nanotech 2005 Vol. 3
Nanotech 2005 Vol. 3
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 3
Chapter 7: Smart Sensors and Systems

High Damping Electrostatic System For Vibration Energy Scavenging

Authors:G. Despesse, J.J. Chaillout, I. Dekkaki, T. Jager, J.M. L├ęger, A. Vassilev, S. Basrour and B. Charlot
Affilation:CEA-LETI, FR
Pages:375 - 378
Keywords:global MEMS simulation, vibration, energy scavenging, electrostatique conversion
Abstract:We report here global simulations and designs of mechanical structures able to recover power over a large spectrum below 100 Hz. Contrary to existing structures tuned on a particular frequency, we have investigated conversion structures with low quality factors allowing power scavenging with a high electrical damping. MATLAB and Mathematica analytical models have been performed to determine the mechanical and electrical parameters that maximize the scavenged power for a wide number of applications. An electrostatic transduction is used to convert vibrations of the moving mass into electrical power.
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