Nanotech 2005 Vol. 3
Nanotech 2005 Vol. 3
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 3

Characterization and Parameter Extraction Chapter 6

Application of MCLC Method for Estimating the Parameters of MEMS Sensors

Authors: E. Colinet, J. Juillard and L. Nicu

Affilation: SUPELEC, France

Pages: 335 - 338

Keywords: parameter extraction, identification, limit cycles, nonlinear systems

Abstract:
An original method for estimating the parameters of MEMS sensors is presented. It is based on the measurement of binary oscillations appearing at the system's output when a discrete-time relay feedback is used: the parameters of the system can then be deduced from the shape of these oscillations with a very good accuracy. This method is presented and demonstrated in the case of the identification of some cantilever micro-beams.

Application of MCLC Method for Estimating the Parameters of MEMS Sensors

ISBN: 0-9767985-2-2
Pages: 786
Hardcopy: $109.95