Nano Science and Technology Institute
Nanotech 2005 Vol. 3
Nanotech 2005 Vol. 3
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 3
 
Chapter 6: Characterization and Parameter Extraction
 

Application of MCLC Method for Estimating the Parameters of MEMS Sensors

Authors:E. Colinet, J. Juillard and L. Nicu
Affilation:SUPELEC, FR
Pages:335 - 338
Keywords:parameter extraction, identification, limit cycles, nonlinear systems
Abstract:An original method for estimating the parameters of MEMS sensors is presented. It is based on the measurement of binary oscillations appearing at the system's output when a discrete-time relay feedback is used: the parameters of the system can then be deduced from the shape of these oscillations with a very good accuracy. This method is presented and demonstrated in the case of the identification of some cantilever micro-beams.
Application of MCLC Method for Estimating the Parameters of MEMS SensorsView PDF of paper
ISBN:0-9767985-2-2
Pages:786
Hardcopy:$109.95
 
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