 | Nanotech 2005 Vol. 3
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 3
Chapter 6: Characterization and Parameter Extraction |
Application of MCLC Method for Estimating the Parameters of MEMS Sensors | |
| Authors: | E. Colinet, J. Juillard and L. Nicu |
| Affilation: | SUPELEC, FR |
| Pages: | 335 - 338 |
| Keywords: | parameter extraction, identification, limit cycles, nonlinear systems |
| Abstract: | An original method for estimating the parameters of MEMS sensors is presented. It is based on the measurement of binary oscillations appearing at the system's output when a discrete-time relay feedback is used: the parameters of the system can then be deduced from the shape of these oscillations with a very good accuracy. This method is presented and demonstrated in the case of the identification of some cantilever micro-beams. |
 | View PDF of paper |
| ISBN: | 0-9767985-2-2 |
| Pages: | 786 |
| Hardcopy: | $109.95 |
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