Nano Science and Technology Institute
Nanotech 2005 Vol. 3
Nanotech 2005 Vol. 3
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 3
Chapter 4: Nano Scale Electronics Processing

A Highly Reliable Pattern Transfer of Hydrogen Silsequioxane

Authors:J.F. Liu, S.Z. Chen, H.J.H. Chen and F.S. Huang
Affilation:National Tsing Hua University, TW
Pages:279 - 282
Keywords:nanoimprint lithography, hydrogen silsequioxane, room temperature aging effect
Abstract:In this paper, we focus on the effects of process parameters on pattern embossing into HSQ films, and the pattern degradation of HSQ for room temperature aging effects. The dilution of HSQ affects not only the film thickness but also pattern transfer. Fidelity pattern replication between mold and HSQ film is due to the plastic deformation of HSQ film during imprinting process. After 20 days room temperature aging, the imprinted HSQ shows no degradation.
A Highly Reliable Pattern Transfer of Hydrogen SilsequioxaneView PDF of paper
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