XPS Studies of Silicon Nanoclusters/Nanocrystals Embedded in SiO2 Matrix

	Nanotech 2005 Vol. 3 Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 3 Chapter 2: CNT, Nano and Molecular Electronics
	XPS Studies of Silicon Nanoclusters/Nanocrystals Embedded in SiO2 Matrix
Authors:	T.P. Chen and Y. Liu
Affilation:	Nanyang Technological University, SG
Pages:	142 - 145
Keywords:	nanocrystal, XPS, annealing effect
Abstract:	In this work, X-ray photoelectron spectroscopy (XPS) is used to study the annealing effects on the chemical structures, depth profiling of the chemical states and core-level shifts of the Si nanocrystals in the Si-implanted SiO2 films.
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ISBN:	0-9767985-2-2
Pages:	786
Hardcopy:	$109.95

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