Nanotech 2005 Vol. 3
Nanotech 2005 Vol. 3
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 3

CNT, Nano and Molecular Electronics Chapter 2

XPS Studies of Silicon Nanoclusters/Nanocrystals Embedded in SiO2 Matrix

Authors: T.P. Chen and Y. Liu

Affilation: Nanyang Technological University, Singapore

Pages: 142 - 145

Keywords: nanocrystal, XPS, annealing effect

Abstract:
In this work, X-ray photoelectron spectroscopy (XPS) is used to study the annealing effects on the chemical structures, depth profiling of the chemical states and core-level shifts of the Si nanocrystals in the Si-implanted SiO2 films.


ISBN: 0-9767985-2-2
Pages: 786
Hardcopy: $109.95

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