Nano Science and Technology Institute
Nanotech 2005 Vol. 3
Nanotech 2005 Vol. 3
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 3
 
Chapter 2: CNT, Nano and Molecular Electronics
 

XPS Studies of Silicon Nanoclusters/Nanocrystals Embedded in SiO2 Matrix

Authors:T.P. Chen and Y. Liu
Affilation:Nanyang Technological University, SG
Pages:142 - 145
Keywords:nanocrystal, XPS, annealing effect
Abstract:In this work, X-ray photoelectron spectroscopy (XPS) is used to study the annealing effects on the chemical structures, depth profiling of the chemical states and core-level shifts of the Si nanocrystals in the Si-implanted SiO2 films.
XPS Studies of Silicon Nanoclusters/Nanocrystals Embedded in SiO2 MatrixView PDF of paper
ISBN:0-9767985-2-2
Pages:786
Hardcopy:$109.95
 
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