XPS Studies of Silicon Nanoclusters/Nanocrystals Embedded in SiO2 Matrix
Authors:
T.P. Chen and Y. Liu
Affilation:
Nanyang Technological University, SG
Pages:
142 - 145
Keywords:
nanocrystal, XPS, annealing effect
Abstract:
In this work, X-ray photoelectron spectroscopy (XPS) is used to study the annealing effects on the chemical structures, depth profiling of the chemical states and core-level shifts of the Si nanocrystals in the Si-implanted SiO2 films.
