Nano Science and Technology Institute
Nanotech 2005 Vol. 3
Nanotech 2005 Vol. 3
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 3
Chapter 10: Computational Methods, Numerics and Software Tools

Finite Element Modeling of Electro-Mechanical Coupling in Capacitive Micro-Systems

Authors:V. Rochus, D.J. Rixen and J.-C. Golinval
Affilation:University of Liege, BE
Pages:704 - 707
Keywords:nonlinearity, electromechanical coupling, FEM
Abstract:The aim of this paper is to deal with multi-physics simulation of micro-electro-mechanical systems (MEMS) based on an advanced numerical methodology. MEMS are very small devices in which electric as well as mechanical and fluid phenomena appear and interact. Because of their microscopic scale, strong coupling effects arise between the different physical fields, and some forces, which were negligible at macroscopic scale, have to be taken into account. In order to accurately design such micro-electro-mechanical systems, it is of primary importance to be able to handle the strong coupling between the electric and the mechanical fields. In this paper, the finite element method (FEM) is used to model the electro-mechanical interactions and to perform modal and transient analyses taking into account large mesh displacements. The application example shown is a micro-bridge consisting in a clamped-clamped beam suspended over a substrate (the lower electrode).
Finite Element Modeling of Electro-Mechanical Coupling in Capacitive Micro-SystemsView PDF of paper
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