IDEA, a CAD Tool for the Design of Deformable Micro-Structures: Extension to the 2D Deformation of Arbitrarily-Shaped Membranes

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A method for solving design problems involving coupled-field physics is presented: it is demonstrated in the case of the electrostatic actuation of a deformable micro-mirror. The focus of the present paper is on the inversion of the mechanical problem in the case of a membrane of arbitrary shape, that is, how to compute the ideal pressure distribution on the membrane which corresponds to a given set of displacements.

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Journal: TechConnect Briefs
Volume: 3, Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 3
Published: May 8, 2005
Pages: 644 - 647
Industry sectors: Advanced Materials & Manufacturing | Sensors, MEMS, Electronics
Topic: Informatics, Modeling & Simulation
ISBN: 0-9767985-2-2