Nano Science and Technology Institute
Nanotech 2005 Vol. 3
Nanotech 2005 Vol. 3
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 3
 
Chapter 10: Computational Methods, Numerics and Software Tools
 

IDEA, a CAD Tool for the Design of Deformable Micro-Structures: Extension to the 2D Deformation of Arbitrarily-Shaped Membranes

Authors:J. Juillard and E. Colinet
Affilation:SUPELEC, FR
Pages:644 - 647
Keywords:control, inverse problems, BEM, coupled-field physics
Abstract:A method for solving design problems involving coupled-field physics is presented: it is demonstrated in the case of the electrostatic actuation of a deformable micro-mirror. The focus of the present paper is on the inversion of the mechanical problem in the case of a membrane of arbitrary shape, that is, how to compute the ideal pressure distribution on the membrane which corresponds to a given set of displacements.
IDEA, a CAD Tool for the Design of Deformable Micro-Structures: Extension to the 2D Deformation of Arbitrarily-Shaped MembranesView PDF of paper
ISBN:0-9767985-2-2
Pages:786
Hardcopy:$109.95
 
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