IDEA, a CAD Tool for the Design of Deformable Micro-Structures: Extension to the 2D Deformation of Arbitrarily-Shaped Membranes

	Nanotech 2005 Vol. 3 Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 3 Chapter 10: Computational Methods, Numerics and Software Tools
	IDEA, a CAD Tool for the Design of Deformable Micro-Structures: Extension to the 2D Deformation of Arbitrarily-Shaped Membranes
Authors:	J. Juillard and E. Colinet
Affilation:	SUPELEC, FR
Pages:	644 - 647
Keywords:	control, inverse problems, BEM, coupled-field physics
Abstract:	A method for solving design problems involving coupled-field physics is presented: it is demonstrated in the case of the electrostatic actuation of a deformable micro-mirror. The focus of the present paper is on the inversion of the mechanical problem in the case of a membrane of arbitrary shape, that is, how to compute the ideal pressure distribution on the membrane which corresponds to a given set of displacements.
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ISBN:	0-9767985-2-2
Pages:	786
Hardcopy:	$109.95

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