Authors: M-Y Yi and J-W Lee
Affilation: Pohang University of Science and Technology, Korea
Pages: 546 - 549
Keywords: nano particle, adhesion, molecular dynamics
Efficient cleaning of nano-sized particles from substrates becomes more and more crucial in nano fabrication. One promising technique is to bombard the contaminant particles with nano-sized bullet particles, but details of the collision process between nano particles are not well understood. This paper reports MD simulation results on the adhesion of nano particles on a flat substrate both with and without deformation, and also on the behaviors of bullet and target particles after collision. The bullet particle is made of low temperature solid Argon and target particle is hard Lennard-Jones solid particle and metal particles. Parameters varied are size of the bullet particles, adhesion force between the target particle and the substrate, velocity and angle of the bullet particle, and substrate temperature. By varying these parameters the motion of the target particle is classified into four motion modes and it is found that not only the total kinetic energy of the bullet particle but also the degree of bullet particle breakup determines the behavior of the target particle after collision.