Nano Science and Technology Institute
Nanotech 2005 Vol. 2
Nanotech 2005 Vol. 2
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 2
Chapter 7: NEMS and MEMS Fabrication

Absolute Pressure Measurement using 3D-MEMS Technology

Authors:R. Russell and U. Meriheinä
Affilation:VTI Technologies, US
Pages:511 - 514
Keywords:capacitive pressure sensor, silicon MEMS sensor, high performance, barometric, altimeter, pressure, absolute, 3D-MEMS technology
Abstract:The use of 3D-MEMS processes has created yet another new breakthrough. Extremely small silicon capacitive absolute pressure sensors can now be realized by utilizing the same MEMS technology that has been in production for many years. The applications where absolute pressure measurement has not been possible due to size or current limitation can now be solved effectively.
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