Authors: R. Russell and U. Meriheinä
Affilation: VTI Technologies, United States
Pages: 511 - 514
Keywords: capacitive pressure sensor, silicon MEMS sensor, high performance, barometric, altimeter, pressure, absolute, 3D-MEMS technology
The use of 3D-MEMS processes has created yet another new breakthrough. Extremely small silicon capacitive absolute pressure sensors can now be realized by utilizing the same MEMS technology that has been in production for many years. The applications where absolute pressure measurement has not been possible due to size or current limitation can now be solved effectively.