NEMS and MEMS Fabrication

	Nanotech 2005 Vol. 2 Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 2 Chapter 7: NEMS and MEMS Fabrication
-	Wafer Scale Fabrication of Nano Probes for Atomic Force Microscopy
	Q.L. Ye, H. Liu, A.M. Cassell, K-J Chao and J. Han
	NASA Ames Research Center, US
-	Effect of Etchant Composition and Silicon Crystal Orientation on Etch Rate
	D. Yellowaga, J. Starzynski, B. Palmer, J. McFarland and S. Drews
	Honeywell, US
-	Fabrication of Complex Diffractive Structures in an Organic-Inorganic Hybrid and Incorporation of Silver Nanoparticles
	F.H. Scholes, F.L. Smith and S.A. Furman
	CSIRO Manufacturing and Infrastructure Technology, AU
-	Fabrication of Nanochannels with Microfluidic Interface using PDMS Casting on Si/Ti Nanomold
	M.J. Rust, S. Subramaniam and C.H. Ahn
	University of Cincinnati, US
-	Direct Patterning of Functional Materials via Atmospheric-Pressure Ion Deposition
	T.E. Hamedinger, T. Steindl, J. Albering, S. Rentenberger and R. Saf
	Graz University of Technology, AU
-	A Gate Layout Technique for Area Reduction in Nano-Wire Circuit Design
	H. Hashempour and F. Lombardi
	LTX Corp., US
-	Pressure Sensor Elements Integrated with CMOS
	J. Kiihamäki, T. Vehmas, T. Suni, A. Häärä, M. Ylimaula and J. Ruohio
	VTT Information Technology, FI
-	Development of Self-Assembled Robust Microvalves with Electroform Fabricated Nano-Structured Nickel
	B. Li and Q. Chen
	University of Central Florida, US
-	Diode Laser Welding of Planar Microfluidic Devices, BioMEMS, Diagnostic Chips & Microarrays
	J-W Chen, J. Zybko and J.T. Clements
	NanoSciences, Inc., US
-	A Unified Compact Model for Electrostatic Discharge Protection Device Simulation
	H-M Chou, Y-Y Cho, J-W Lee and Y. Li
	National Chiao Tung University, TW
-	Direct Wafer Polishing with 5 nm Diamond
	J.C-M Sung and M-F Tai
	Kinik Company, TW
-	Fabrication of Well-aligned and Mono-modal Germanium Dots on the Silicon Substrate with Trench-ridge Nano-structures
	Y.J. Chen, Y.H. Peng, P.S. Chen and C.H. Kuan
	National Taiwan University, TW
-	Application of Magnetic Neutral Loop Discharge Plasma in Deep Quartz and Silicon Etching Process for MEMS/NEMS Devices Fabrication
	Y. Morikawa, T. Hayashi, K. Suu and M. Ishikawa
	ULVAC, Inc., JP
-	Microfabricated Silicon Apertures for Ion Channel Measurement
	S.J. Wilk, M. Goryll, L. Petrossian, G.M. Laws, S.M. Goodnick, T.J. Thornton, M. Saraniti, J.M. Tang and R.S. Eisenberg
	Arizona State University, US
-	A Novel Method of Fabricating Optical Gratings Using the One Step DRIE Process on SOI Wafers
	A.W. Cooper, P.T. Docker and M.C. Ward
	The University of Birmingham, UK
-	Absolute Pressure Measurement using 3D-MEMS Technology
	R. Russell and U. Meriheinä
	VTI Technologies, US
-	Fabrication of Silicon Nanowires Using Atomic Layer Deposition
	D. Gopireddy, C.G. Takoudis, D. Gamota, J. Zhang and P.W. Brazis
	University of Illinois at Chicago, US
-	Metal-oxide Nanowires for Toxic Gas Detection
	D.P. Devineni, S. Stormo, W. Kempf, J. Schenkel, R. Behanan, S. Lea and D.W. Galipeau
	South Dakota State University, US
-	Microfabrication of 3D Structures Using Novel Thermoplastic Elastomers
	A.P. Sudarsan, J. Wang and V.M. Ugaz
	Texas A&M University, US
ISBN:	0-9767985-1-4
Pages:	808
Hardcopy:	$109.95

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