 | Nanotech 2005 Vol. 2
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 2
Chapter 7: NEMS and MEMS Fabrication |
| - | Wafer Scale Fabrication of Nano Probes for Atomic Force Microscopy |
| | Q.L. Ye, H. Liu, A.M. Cassell, K-J Chao and J. Han |
| | NASA Ames Research Center, US |
| - | Effect of Etchant Composition and Silicon Crystal Orientation on Etch Rate |
| | D. Yellowaga, J. Starzynski, B. Palmer, J. McFarland and S. Drews |
| | Honeywell, US |
| - | Fabrication of Complex Diffractive Structures in an Organic-Inorganic Hybrid and Incorporation of Silver Nanoparticles |
| | F.H. Scholes, F.L. Smith and S.A. Furman |
| | CSIRO Manufacturing and Infrastructure Technology, AU |
| - | Fabrication of Nanochannels with Microfluidic Interface using PDMS Casting on Si/Ti Nanomold |
| | M.J. Rust, S. Subramaniam and C.H. Ahn |
| | University of Cincinnati, US |
| - | Direct Patterning of Functional Materials via Atmospheric-Pressure Ion Deposition |
| | T.E. Hamedinger, T. Steindl, J. Albering, S. Rentenberger and R. Saf |
| | Graz University of Technology, AU |
| - | A Gate Layout Technique for Area Reduction in Nano-Wire Circuit Design |
| | H. Hashempour and F. Lombardi |
| | LTX Corp., US |
| - | Pressure Sensor Elements Integrated with CMOS |
| | J. Kiihamäki, T. Vehmas, T. Suni, A. Häärä, M. Ylimaula and J. Ruohio |
| | VTT Information Technology, FI |
| - | Development of Self-Assembled Robust Microvalves with Electroform Fabricated Nano-Structured Nickel |
| | B. Li and Q. Chen |
| | University of Central Florida, US |
| - | Diode Laser Welding of Planar Microfluidic Devices, BioMEMS, Diagnostic Chips & Microarrays |
| | J-W Chen, J. Zybko and J.T. Clements |
| | NanoSciences, Inc., US |
| - | A Unified Compact Model for Electrostatic Discharge Protection Device Simulation |
| | H-M Chou, Y-Y Cho, J-W Lee and Y. Li |
| | National Chiao Tung University, TW |
| - | Direct Wafer Polishing with 5 nm Diamond |
| | J.C-M Sung and M-F Tai |
| | Kinik Company, TW |
| - | Fabrication of Well-aligned and Mono-modal Germanium Dots on the Silicon Substrate with Trench-ridge Nano-structures |
| | Y.J. Chen, Y.H. Peng, P.S. Chen and C.H. Kuan |
| | National Taiwan University, TW |
| - | Application of Magnetic Neutral Loop Discharge Plasma in Deep Quartz and Silicon Etching Process for MEMS/NEMS Devices Fabrication |
| | Y. Morikawa, T. Hayashi, K. Suu and M. Ishikawa |
| | ULVAC, Inc., JP |
| - | Microfabricated Silicon Apertures for Ion Channel Measurement |
| | S.J. Wilk, M. Goryll, L. Petrossian, G.M. Laws, S.M. Goodnick, T.J. Thornton, M. Saraniti, J.M. Tang and R.S. Eisenberg |
| | Arizona State University, US |
| - | A Novel Method of Fabricating Optical Gratings Using the One Step DRIE Process on SOI Wafers |
| | A.W. Cooper, P.T. Docker and M.C. Ward |
| | The University of Birmingham, UK |
| - | Absolute Pressure Measurement using 3D-MEMS Technology |
| | R. Russell and U. Meriheinä |
| | VTI Technologies, US |
| - | Fabrication of Silicon Nanowires Using Atomic Layer Deposition |
| | D. Gopireddy, C.G. Takoudis, D. Gamota, J. Zhang and P.W. Brazis |
| | University of Illinois at Chicago, US |
| - | Metal-oxide Nanowires for Toxic Gas Detection |
| | D.P. Devineni, S. Stormo, W. Kempf, J. Schenkel, R. Behanan, S. Lea and D.W. Galipeau |
| | South Dakota State University, US |
| - | Microfabrication of 3D Structures Using Novel Thermoplastic Elastomers |
| | A.P. Sudarsan, J. Wang and V.M. Ugaz |
| | Texas A&M University, US |
| - | Wafer Scale Fabrication of Nano Probes for Atomic Force Microscopy |
| | Q.L. Ye, H. Liu, A.M. Cassell, K-J Chao and J. Han |
| | NASA Ames Research Center, US |
| - | Effect of Etchant Composition and Silicon Crystal Orientation on Etch Rate |
| | D. Yellowaga, J. Starzynski, B. Palmer, J. McFarland and S. Drews |
| | Honeywell, US |
| - | Fabrication of Complex Diffractive Structures in an Organic-Inorganic Hybrid and Incorporation of Silver Nanoparticles |
| | F.H. Scholes, F.L. Smith and S.A. Furman |
| | CSIRO Manufacturing and Infrastructure Technology, AU |
| - | Fabrication of Nanochannels with Microfluidic Interface using PDMS Casting on Si/Ti Nanomold |
| | M.J. Rust, S. Subramaniam and C.H. Ahn |
| | University of Cincinnati, US |
| - | Direct Patterning of Functional Materials via Atmospheric-Pressure Ion Deposition |
| | T.E. Hamedinger, T. Steindl, J. Albering, S. Rentenberger and R. Saf |
| | Graz University of Technology, AU |
| - | A Gate Layout Technique for Area Reduction in Nano-Wire Circuit Design |
| | H. Hashempour and F. Lombardi |
| | LTX Corp., US |
| - | Pressure Sensor Elements Integrated with CMOS |
| | J. Kiihamäki, T. Vehmas, T. Suni, A. Häärä, M. Ylimaula and J. Ruohio |
| | VTT Information Technology, FI |
| - | Development of Self-Assembled Robust Microvalves with Electroform Fabricated Nano-Structured Nickel |
| | B. Li and Q. Chen |
| | University of Central Florida, US |
| - | Diode Laser Welding of Planar Microfluidic Devices, BioMEMS, Diagnostic Chips & Microarrays |
| | J-W Chen, J. Zybko and J.T. Clements |
| | NanoSciences, Inc., US |
| - | A Unified Compact Model for Electrostatic Discharge Protection Device Simulation |
| | H-M Chou, Y-Y Cho, J-W Lee and Y. Li |
| | National Chiao Tung University, TW |
| - | Direct Wafer Polishing with 5 nm Diamond |
| | J.C-M Sung and M-F Tai |
| | Kinik Company, TW |
| - | Fabrication of Well-aligned and Mono-modal Germanium Dots on the Silicon Substrate with Trench-ridge Nano-structures |
| | Y.J. Chen, Y.H. Peng, P.S. Chen and C.H. Kuan |
| | National Taiwan University, TW |
| - | Application of Magnetic Neutral Loop Discharge Plasma in Deep Quartz and Silicon Etching Process for MEMS/NEMS Devices Fabrication |
| | Y. Morikawa, T. Hayashi, K. Suu and M. Ishikawa |
| | ULVAC, Inc., JP |
| - | Microfabricated Silicon Apertures for Ion Channel Measurement |
| | S.J. Wilk, M. Goryll, L. Petrossian, G.M. Laws, S.M. Goodnick, T.J. Thornton, M. Saraniti, J.M. Tang and R.S. Eisenberg |
| | Arizona State University, US |
| - | A Novel Method of Fabricating Optical Gratings Using the One Step DRIE Process on SOI Wafers |
| | A.W. Cooper, P.T. Docker and M.C. Ward |
| | The University of Birmingham, UK |
| - | Absolute Pressure Measurement using 3D-MEMS Technology |
| | R. Russell and U. Meriheinä |
| | VTI Technologies, US |
| - | Fabrication of Silicon Nanowires Using Atomic Layer Deposition |
| | D. Gopireddy, C.G. Takoudis, D. Gamota, J. Zhang and P.W. Brazis |
| | University of Illinois at Chicago, US |
| - | Metal-oxide Nanowires for Toxic Gas Detection |
| | D.P. Devineni, S. Stormo, W. Kempf, J. Schenkel, R. Behanan, S. Lea and D.W. Galipeau |
| | South Dakota State University, US |
| - | Microfabrication of 3D Structures Using Novel Thermoplastic Elastomers |
| | A.P. Sudarsan, J. Wang and V.M. Ugaz |
| | Texas A&M University, US |
| ISBN: | 0-9767985-1-4 |
| Pages: | 808 |
| Hardcopy: | $165.00 |
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| Order: | Mail/Fax Form |
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