Nanotech 2005 Vol. 2
Nanotech 2005 Vol. 2
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 2

NEMS and MEMS Fabrication Chapter 7

Wafer Scale Fabrication of Nano Probes for Atomic Force Microscopy
Q.L. Ye, H. Liu, A.M. Cassell, K-J Chao and J. Han
NASA Ames Research Center, US

Effect of Etchant Composition and Silicon Crystal Orientation on Etch Rate
D. Yellowaga, J. Starzynski, B. Palmer, J. McFarland and S. Drews
Honeywell, US

Fabrication of Complex Diffractive Structures in an Organic-Inorganic Hybrid and Incorporation of Silver Nanoparticles
F.H. Scholes, F.L. Smith and S.A. Furman
CSIRO Manufacturing and Infrastructure Technology, AU

Fabrication of Nanochannels with Microfluidic Interface using PDMS Casting on Si/Ti Nanomold
M.J. Rust, S. Subramaniam and C.H. Ahn
University of Cincinnati, US

Direct Patterning of Functional Materials via Atmospheric-Pressure Ion Deposition
T.E. Hamedinger, T. Steindl, J. Albering, S. Rentenberger and R. Saf
Graz University of Technology, AU

A Gate Layout Technique for Area Reduction in Nano-Wire Circuit Design
H. Hashempour and F. Lombardi
LTX Corp., US

Pressure Sensor Elements Integrated with CMOS
J. Kiihamäki, T. Vehmas, T. Suni, A. Häärä, M. Ylimaula and J. Ruohio
VTT Information Technology, FI

Development of Self-Assembled Robust Microvalves with Electroform Fabricated Nano-Structured Nickel
B. Li and Q. Chen
University of Central Florida, US

Diode Laser Welding of Planar Microfluidic Devices, BioMEMS, Diagnostic Chips & Microarrays
J-W Chen, J. Zybko and J.T. Clements
NanoSciences, Inc., US

A Unified Compact Model for Electrostatic Discharge Protection Device Simulation
H-M Chou, Y-Y Cho, J-W Lee and Y. Li
National Chiao Tung University, TW

Direct Wafer Polishing with 5 nm Diamond
J.C-M Sung and M-F Tai
Kinik Company, TW

Fabrication of Well-aligned and Mono-modal Germanium Dots on the Silicon Substrate with Trench-ridge Nano-structures
Y.J. Chen, Y.H. Peng, P.S. Chen and C.H. Kuan
National Taiwan University, TW

Application of Magnetic Neutral Loop Discharge Plasma in Deep Quartz and Silicon Etching Process for MEMS/NEMS Devices Fabrication
Y. Morikawa, T. Hayashi, K. Suu and M. Ishikawa
ULVAC, Inc., JP

Microfabricated Silicon Apertures for Ion Channel Measurement
S.J. Wilk, M. Goryll, L. Petrossian, G.M. Laws, S.M. Goodnick, T.J. Thornton, M. Saraniti, J.M. Tang and R.S. Eisenberg
Arizona State University, US

A Novel Method of Fabricating Optical Gratings Using the One Step DRIE Process on SOI Wafers
A.W. Cooper, P.T. Docker and M.C. Ward
The University of Birmingham, UK

Absolute Pressure Measurement using 3D-MEMS Technology
R. Russell and U. Meriheinä
VTI Technologies, US

Fabrication of Silicon Nanowires Using Atomic Layer Deposition
D. Gopireddy, C.G. Takoudis, D. Gamota, J. Zhang and P.W. Brazis
University of Illinois at Chicago, US

Metal-oxide Nanowires for Toxic Gas Detection
D.P. Devineni, S. Stormo, W. Kempf, J. Schenkel, R. Behanan, S. Lea and D.W. Galipeau
South Dakota State University, US

Microfabrication of 3D Structures Using Novel Thermoplastic Elastomers
A.P. Sudarsan, J. Wang and V.M. Ugaz
Texas A&M University, US


ISBN: 0-9767985-1-4
Pages: 808
Hardcopy: $109.95