Nanotech 2005 Vol. 2
Nanotech 2005 Vol. 2
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 2

Surfaces and Films Chapter 5

Nanocharacterization Using Secondary Ion Mass Spectrometry (SIMS)

Authors: S.W. Novak and C.W. Magee

Affilation: Evans East - Evans Analytical Group, United States

Pages: 400 - 403

Keywords: SIMS, films, copolymers

Abstract:
Secondary Ion Mass Spectrometry (SIMS) has been widely applied for depth profile analysis in the semiconductor industry, but less widely applied to characterization of other materials. Evans East has developed techniques over the last few years to bombard samples with ultra-low energy beams (


ISBN: 0-9767985-1-4
Pages: 808
Hardcopy: $109.95

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