Nano Science and Technology Institute
Nanotech 2005 Vol. 2
Nanotech 2005 Vol. 2
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 2
Chapter 5: Surfaces and Films

Nanocharacterization Using Secondary Ion Mass Spectrometry (SIMS)

Authors:S.W. Novak and C.W. Magee
Affilation:Evans East - Evans Analytical Group, US
Pages:400 - 403
Keywords:SIMS, films, copolymers
Abstract:Secondary Ion Mass Spectrometry (SIMS) has been widely applied for depth profile analysis in the semiconductor industry, but less widely applied to characterization of other materials. Evans East has developed techniques over the last few years to bombard samples with ultra-low energy beams (
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