Nano Science and Technology Institute
Nanotech 2005 Vol. 2
Nanotech 2005 Vol. 2
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 2
Chapter 5: Surfaces and Films

Durable Anti-Stiction Coatings by Molecular Vapor Deposition (MVD)

Authors:B. Kobrin, J. Chinn and R.W. Ashurst
Affilation:Applied Microstructures, Inc., US
Pages:347 - 350
Keywords:stiction, self-assembled monolayer, SAM, hydrophobic, hydrophilic, durable, coating, film, surface modification
Abstract:Development of new SAM coatings using a “sequential” vapor technique which can be deposited on almost any substrate material and withstand harsh environments is reported. Technical benefits for the improved surface modification method called Molecular Vapor Deposition (MVD) are discussed.
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