Nanotech 2005 Vol. 2
Nanotech 2005 Vol. 2
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 2

Surfaces and Films Chapter 5

Durable Anti-Stiction Coatings by Molecular Vapor Deposition (MVD)

Authors: B. Kobrin, J. Chinn and R.W. Ashurst

Affilation: Applied Microstructures, Inc., United States

Pages: 347 - 350

Keywords: stiction, self-assembled monolayer, SAM, hydrophobic, hydrophilic, durable, coating, film, surface modification

Abstract:
Development of new SAM coatings using a “sequential” vapor technique which can be deposited on almost any substrate material and withstand harsh environments is reported. Technical benefits for the improved surface modification method called Molecular Vapor Deposition (MVD) are discussed.

Durable Anti-Stiction Coatings by Molecular Vapor Deposition (MVD)

ISBN: 0-9767985-1-4
Pages: 808
Hardcopy: $109.95