Durable Anti-Stiction Coatings by Molecular Vapor Deposition (MVD)

	Nanotech 2005 Vol. 2 Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 2 Chapter 5: Surfaces and Films
	Durable Anti-Stiction Coatings by Molecular Vapor Deposition (MVD)
Authors:	B. Kobrin, J. Chinn and R.W. Ashurst
Affilation:	Applied Microstructures, Inc., US
Pages:	347 - 350
Keywords:	stiction, self-assembled monolayer, SAM, hydrophobic, hydrophilic, durable, coating, film, surface modification
Abstract:	Development of new SAM coatings using a “sequential” vapor technique which can be deposited on almost any substrate material and withstand harsh environments is reported. Technical benefits for the improved surface modification method called Molecular Vapor Deposition (MVD) are discussed.
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ISBN:	0-9767985-1-4
Pages:	808
Hardcopy:	$109.95

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