Authors: B. Kobrin, J. Chinn and R.W. Ashurst
Affilation: Applied Microstructures, Inc., United States
Pages: 347 - 350
Keywords: stiction, self-assembled monolayer, SAM, hydrophobic, hydrophilic, durable, coating, film, surface modification
Development of new SAM coatings using a “sequential” vapor technique which can be deposited on almost any substrate material and withstand harsh environments is reported. Technical benefits for the improved surface modification method called Molecular Vapor Deposition (MVD) are discussed.