 | Nanotech 2005 Vol. 2
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 2
Chapter 4: Nano Devices and Systems |
RuO2 and Ru Nanoparticles for MISiC-FET Gas Sensors | |
| Authors: | A. Salomonsson, S. Roy, C. Aulin, L. Ojamäe, P.-O. Käll, M. Strand, M. Sanati, A. Lloyd Spetz |
| Affilation: | IFM, SE |
| Pages: | 269 - 272 |
| Keywords: | RuO2, Ru, SiC-FET, C(V) catalytically active nanoparticles |
| Abstract: | Catalytically active nanoparticles used as gate material on SiC-FET gas sensors. The goal is to improve the selsectivity and senstitivty.The sensors are sensitive towards oxidising and reducing gases (H2, NH3, C3H6). |
 | View PDF of paper |
| ISBN: | 0-9767985-1-4 |
| Pages: | 808 |
| Hardcopy: | $109.95 |
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