Nano Science and Technology Institute
Nanotech 2005 Vol. 2
Nanotech 2005 Vol. 2
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 2
 
Chapter 4: Nano Devices and Systems
 

RuO2 and Ru Nanoparticles for MISiC-FET Gas Sensors

Authors:A. Salomonsson, S. Roy, C. Aulin, L. Ojamäe, P.-O. Käll, M. Strand, M. Sanati, A. Lloyd Spetz
Affilation:IFM, SE
Pages:269 - 272
Keywords:RuO2, Ru, SiC-FET, C(V) catalytically active nanoparticles
Abstract:Catalytically active nanoparticles used as gate material on SiC-FET gas sensors. The goal is to improve the selsectivity and senstitivty.The sensors are sensitive towards oxidising and reducing gases (H2, NH3, C3H6).
RuO2 and Ru Nanoparticles for MISiC-FET Gas SensorsView PDF of paper
ISBN:0-9767985-1-4
Pages:808
Hardcopy:$109.95
 
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