Authors: D. Routkevitch, O. Polyakov, D. Deininger and C. Kostelecky
Affilation: Synkera Technologies, Inc., United States
Pages: 266 - 268
Keywords: solid state gas sensor, microsensor, ceramic MEMS
Nanostructured materials, with their small grain size, large number of grain boundaries, and high specific surface area, hold promise for significantly improving the performance of solid-state gas sensors. To fully realize this potential, precision nanoscale engineering of the morphology and composition of sensing materials is needed. Furthermore, multiple challenges are associated with integration of nanostructured materials into reliable and manufacturable microsensors. This talk will provide an overview of our efforts to address these challenges through development of a novel gas microsensor platform based on self-organized nanoporous ceramic. Featured sensors incorporate a thermally isolated high surface area nanostructured sensing element interfaced with both microheater and sensing electrodes. In this talk we will discuss the effects of sensor design, specific surface area, deposition processes and other factors on sensor fabrication and performance. The microsensor architecture described in this presentation has numerous advantages over conventional sensors. Several types of gas microsensor products are under development at Synkera Technologies using this platform. This presentation will highlight our recent results related to sensing of low level (0.1-100 ppm) water vapor for high altitude low temperature balloon-born meteorological measurements, process control and other demanding applications. Several other case studies will be briefly overviewed.