Nano Science and Technology Institute
Nanotech 2005 Vol. 2
Nanotech 2005 Vol. 2
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 2
Chapter 3: Carbon Nano Structures

Fabrication of Nanometer-Sized Structures by C-NEMS Technology

Authors:K-S Ma, G-Y Jia, Q. Xu, H. Zhou, C-L Wang, J. Zoval and M. Madou
Affilation:University of California, Irvine, US
Pages:151 - 154
Keywords:nano wires, carbon NEMS, electron beam lithography, EBL, SU8
Abstract:We have demonstrated a technique to fabricate carbon nano wires of controllable dimension and location using a top-down methodology. The width and thickness of the wires are in the tens of nanometer range. Additionally, the technique is capable to produce conducting carbon nano wires with addressable positioning, controllable length, high aspect ratio (length vs width) and alignment. The addressable and patternable carbon nano wires we developed can be exploited in large-scale assembly to make highly integrated nano wire sensor arrays or electronic devices.
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