Tang Q., Shi S.Q., Zhou L.M., Xu C.H.
The Hong Kong Polytechnic University, CN
Keywords: atomic force microscopy, dip-pen nanolithography, gold ball, gold thin film, PVDF-TrFE
An AFM-based nanolithography, dip-pen nanolithography is becoming a promising nanotechnology since its invention.However, there exists much uncertaintied in DPN process.Much research work are required to do in order to make it as a competitive nanolithography .In this work, we studied the surface morphology on the transfer rate of a ferroelectric polymer via dip-pen nanolithography, and found surface roughness play important role during dip-pen nanolithography process.
Journal: TechConnect Briefs
Volume: 2, Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 2
Published: May 8, 2005
Pages: 711 - 714
Industry sector: Advanced Materials & Manufacturing
Topic: Materials Characterization & Imaging
ISBN: 0-9767985-1-4