Authors: H-H Liao and Y-J Yang
Affilation: National Taiwan University, Taiwan
Pages: 707 - 710
Keywords: MEMS, NEMS, nanoscale imaging, dynamic measurement
Recently, the rapid growth of micro- and nano-electromechanical systems (MEMS/NEMS) boosts the demands of advanced diagnostic tools and characterization techniques. One of the most critical demands is the high-resolution tools for measuring MEMS/NEMS dynamic behaviors, such as displacement and velocity. In [1-2], in-plane motions of MEMS devices can be measured up to nano-meters resolution using the stroboscopic principle as well as gradient-based algorithm. Also, with a focus controller, the out-of-plane motion can be measured. In , the focus controller was replaced with a splitter and vibrating mirrors that can be integrated inside a microscope, and the out-of-plane resolution was significantly increased. In [4-5], the combination of the optical interferometry and the stroboscopy enables 3D measurement of MEMS devices. In this work, we develop a MEMS/NEMS dynamics measurement tool which employs the stroboscopic principle.