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 | Nanotech 2005 Vol. 2
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 2
Chapter 11: Characterization Tools and Microscopy |
| | MEMS/NEMS Dynamics Measurement Tool Using The Stroboscopic Principle | | Authors: | H-H Liao and Y-J Yang | | Affilation: | National Taiwan University, TW | | Pages: | 707 - 710 | | Keywords: | MEMS, NEMS, nanoscale imaging, dynamic measurement | | Abstract: | Recently, the rapid growth of micro- and nano-electromechanical systems (MEMS/NEMS) boosts the demands of advanced diagnostic tools and characterization techniques. One of the most critical demands is the high-resolution tools for measuring MEMS/NEMS dynamic behaviors, such as displacement and velocity. In [1-2], in-plane motions of MEMS devices can be measured up to nano-meters resolution using the stroboscopic principle as well as gradient-based algorithm. Also, with a focus controller, the out-of-plane motion can be measured. In [3], the focus controller was replaced with a splitter and vibrating mirrors that can be integrated inside a microscope, and the out-of-plane resolution was significantly increased. In [4-5], the combination of the optical interferometry and the stroboscopy enables 3D measurement of MEMS devices. In this work, we develop a MEMS/NEMS dynamics measurement tool which employs the stroboscopic principle. | | ISBN: | 0-9767985-1-4 |
| Pages: | 808 |
| Hardcopy: | $165.00 |
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