Nano Science and Technology Institute
Nanotech 2005 Vol. 2
Nanotech 2005 Vol. 2
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 2
Chapter 11: Characterization Tools and Microscopy

New Developments in Spectroscopic Ellipsometry for Nano Sciences

Authors:J.-P. Piel, A. Darragon and C. Defranoux
Affilation:SOPRA-SA, FR
Pages:698 - 702
Keywords:spectroscopic ellipsometry
Abstract:Spectroscopic Ellipsometry (SE) is an optical technique, non destructive, to characterize the complex reflectivity of surfaces and layers from the deep UV (190nm) to the mid InfraRed (20µ). SE does not need any reference surface like interferometry nor reference materials or reference beam like in absorption spectroscopy (IRRAS): this is an absolute technique often called first principal technique.
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