 | Nanotech 2005 Vol. 2
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 2
Chapter 11: Characterization Tools and Microscopy |
New Developments in Spectroscopic Ellipsometry for Nano Sciences | |
| Authors: | J.-P. Piel, A. Darragon and C. Defranoux |
| Affilation: | SOPRA-SA, FR |
| Pages: | 698 - 702 |
| Keywords: | spectroscopic ellipsometry |
| Abstract: | Spectroscopic Ellipsometry (SE) is an optical technique, non destructive, to characterize the complex reflectivity of surfaces and layers from the deep UV (190nm) to the mid InfraRed (20µ). SE does not need any reference surface like interferometry nor reference materials or reference beam like in absorption spectroscopy (IRRAS): this is an absolute technique often called first principal technique. |
 | View PDF of paper |
| ISBN: | 0-9767985-1-4 |
| Pages: | 808 |
| Hardcopy: | $109.95 |
| Order: | Mail/Fax Form |
| Special: | 3 CD Set — 15% off with Free Shipping |
| Up |
© 2013 Nano Science and Technology Institute. All Rights Reserved.
Terms of Use | Privacy Policy | Contact Us | Site Map
Terms of Use | Privacy Policy | Contact Us | Site Map