Nanotech 2005 Vol. 2
Nanotech 2005 Vol. 2
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 2

Characterization Tools and Microscopy Chapter 11

Integrated Optical Profiler and AFM: a 3D Metrology System for Nanotechnology

Authors: M. Jobin, A. Du and R. Foschia

Affilation: University of Applied Sciences, Switzerland

Pages: 695 - 697

Keywords: atomic force microscopy, interferance microscopy, nanoscale metrology

Abstract:
A versatile 3D metrology tool for nanotechnology purpose has been built. It consist of an home-made white-light interferance microscope operating in the vertical scanning mode, integrated into a commercial Atomic Force Microscope. The performance in terms of acuracy, speed and noise level of the instruments will be presented as well as one illustrative application in MEMS industry.

Integrated Optical Profiler and AFM: a 3D Metrology System for Nanotechnology

ISBN: 0-9767985-1-4
Pages: 808
Hardcopy: $109.95