 | Nanotech 2005 Vol. 2
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 2
Chapter 11: Characterization Tools and Microscopy |
Integrated Optical Profiler and AFM: a 3D Metrology System for Nanotechnology | |
| Authors: | M. Jobin, A. Du and R. Foschia |
| Affilation: | University of Applied Sciences, CH |
| Pages: | 695 - 697 |
| Keywords: | atomic force microscopy, interferance microscopy, nanoscale metrology |
| Abstract: | A versatile 3D metrology tool for nanotechnology purpose has been built. It consist of an home-made white-light interferance microscope operating in the vertical scanning mode, integrated into a commercial Atomic Force Microscope. The performance in terms of acuracy, speed and noise level of the instruments will be presented as well as one illustrative application in MEMS industry. |
 | View PDF of paper |
| ISBN: | 0-9767985-1-4 |
| Pages: | 808 |
| Hardcopy: | $109.95 |
| Order: | Mail/Fax Form |
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