Authors: M. Jobin, A. Du and R. Foschia
Affilation: University of Applied Sciences, Switzerland
Pages: 695 - 697
Keywords: atomic force microscopy, interferance microscopy, nanoscale metrology
A versatile 3D metrology tool for nanotechnology purpose has been built. It consist of an home-made white-light interferance microscope operating in the vertical scanning mode, integrated into a commercial Atomic Force Microscope. The performance in terms of acuracy, speed and noise level of the instruments will be presented as well as one illustrative application in MEMS industry.