Nano Science and Technology Institute
Nanotech 2005 Vol. 2
Nanotech 2005 Vol. 2
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 2
Chapter 11: Characterization Tools and Microscopy

Advanced Particle Beam Technologies for Nano-Characterization and Fabrication

Authors:J.J.L. Mulders and J. Greiser
Affilation:FEI Company, NL
Pages:687 - 690
Keywords:electron microscopy, focused ion beam, nanoprototyping, tomography
Abstract:As the structures under investigation grow ever smaller, the need for high resolution, nanoscale imaging and protoyping is a constant factor. The presented range of DualBeam and single column focused ion and electron beam microscopes enables manufacturers and R&D people to keep pace with technology shifts and develop next generation technologies and products. For example, one key application enabled by the use of these tools is the manufacture of carbon nanotubes. The ability to develop, manipulate and clean the tubes with the use of an ion beam from could help to enable very small transistors.
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