Nanotech 2005 Vol. 2
Nanotech 2005 Vol. 2
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 2

Characterization Tools and Microscopy Chapter 11

Optimization of Nano-Machining with Focused IonBeams

Authors: L.A. Giannuzzi, P. Anzalone and D. Phifer

Affilation: FEI Company, United States

Pages: 683 - 686

Keywords: FIB, nano-machining

Abstract:
It is shown that by optimizing ion-solidinteractions, nano-lines of different aspect ratios can be machined into samples using focused ionbeams.

Optimization of Nano-Machining with Focused IonBeams

ISBN: 0-9767985-1-4
Pages: 808
Hardcopy: $109.95