Nano Science and Technology Institute
Nanotech 2005 Vol. 2
Nanotech 2005 Vol. 2
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 2
Chapter 11: Characterization Tools and Microscopy

Optimization of Nano-Machining with Focused IonBeams

Authors:L.A. Giannuzzi, P. Anzalone and D. Phifer
Affilation:FEI Company, US
Pages:683 - 686
Keywords:FIB, nano-machining
Abstract:It is shown that by optimizing ion-solidinteractions, nano-lines of different aspect ratios can be machined into samples using focused ionbeams.
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