 | Nanotech 2005 Vol. 2
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 2
Chapter 11: Characterization Tools and Microscopy |
Optimization of Nano-Machining with Focused IonBeams | |
| Authors: | L.A. Giannuzzi, P. Anzalone and D. Phifer |
| Affilation: | FEI Company, US |
| Pages: | 683 - 686 |
| Keywords: | FIB, nano-machining |
| Abstract: | It is shown that by optimizing ion-solidinteractions, nano-lines of different aspect ratios can be machined into samples using focused ionbeams. |
 | View PDF of paper |
| ISBN: | 0-9767985-1-4 |
| Pages: | 808 |
| Hardcopy: | $109.95 |
| Order: | Mail/Fax Form |
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