Subramanya Mayya K., Yeo I-S, Chung U-I, Moon J.T.
Samsung Electronics Co.Ltd., KR
Keywords: nanoparticles, nanoscale materials, self assembled monolayer, spin coating
A method for deposition of uniform monolayers of cobalt nanoparticles (size ~ 10 nm) with uniformity in the nanoscale upto the macroscale is demonstrated on a 6″ wafer by a modified spin coating method. The deposition method if general and could have applications like single electron transistors, nanoparticle based memory, data storage applications etc.
Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 1
Published: May 8, 2005
Pages: 797 - 799
Industry sectors: Advanced Materials & Manufacturing | Personal & Home Care, Food & Agriculture
Topic: Personal & Home Care, Food & Agriculture
ISBN: 0-9767985-0-6