Nano Science and Technology Institute
Nanotech 2004 Vol. 3
Nanotech 2004 Vol. 3
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 3
 
Chapter 7: Surfaces and Films
 

The Measurement of Ferroelectric Thin Films Using Piezo Force Microscopy

Authors:M.G. Cain, S. Dunn and P. Jones
Affilation:National Physical Laboratory, UK
Pages:362 - 365
Keywords:ferroelectric thin films, piezoelectric, AFM
Abstract:The use of Atomic Force Microscopy to evaluated the surface properties of ferroelectric thin films is often associated with poor signal to noise ratio images and quantitative analysis is not possible. In this presentation the metrology associated with this technique is explored, and results comparing different materials types and surface cleanliness are described.
The Measurement of Ferroelectric Thin Films Using Piezo Force MicroscopyView PDF of paper
ISBN:0-9728422-9-2
Pages:561
Hardcopy:$79.95
 
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