 | Nanotech 2004 Vol. 3
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 3
Chapter 7: Surfaces and Films |
| | The Measurement of Ferroelectric Thin Films Using Piezo Force Microscopy |
| Authors: | M.G. Cain, S. Dunn and P. Jones |
| Affilation: | National Physical Laboratory, UK |
| Pages: | 362 - 365 |
| Keywords: | ferroelectric thin films, piezoelectric, AFM |
| Abstract: | The use of Atomic Force Microscopy to evaluated the surface properties of ferroelectric thin films is often associated with poor signal to noise ratio images and quantitative analysis is not possible. In this presentation the metrology associated with this technique is explored, and results comparing different materials types and surface cleanliness are described. |
| ISBN: | 0-9728422-9-2 |
| Pages: | 561 |
| Hardcopy: | $150.00 |
|
| Order: | Mail/Fax Form |
| Special: | 3 CD Set — 15% off with Free Shipping |
| Up | |
