Nanotech 2004 Vol. 3
Nanotech 2004 Vol. 3
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 3

Surfaces and Films Chapter 7

The Measurement of Ferroelectric Thin Films Using Piezo Force Microscopy

Authors: M.G. Cain, S. Dunn and P. Jones

Affilation: National Physical Laboratory, United Kingdom

Pages: 362 - 365

Keywords: ferroelectric thin films, piezoelectric, AFM

Abstract:
The use of Atomic Force Microscopy to evaluated the surface properties of ferroelectric thin films is often associated with poor signal to noise ratio images and quantitative analysis is not possible. In this presentation the metrology associated with this technique is explored, and results comparing different materials types and surface cleanliness are described.


ISBN: 0-9728422-9-2
Pages: 561
Hardcopy: $79.95

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