Authors: M.G. Cain, S. Dunn and P. Jones
Affilation: National Physical Laboratory, United Kingdom
Pages: 362 - 365
Keywords: ferroelectric thin films, piezoelectric, AFM
The use of Atomic Force Microscopy to evaluated the surface properties of ferroelectric thin films is often associated with poor signal to noise ratio images and quantitative analysis is not possible. In this presentation the metrology associated with this technique is explored, and results comparing different materials types and surface cleanliness are described.