Authors: C.C. Huang and K.L. Ekinci
Affilation: Boston University, United States
Pages: 187 - 189
Keywords: nano-electro-mechanical systems, nano-electro-mechanical switch, mechanical logic
Here, we describe the operation of a nano-electro-mechanical contact switch. The switch design relies on a sharp contact tip integrated to a compliant nanomechanical beam. When the beam is actuated electrostatically, the tip establishes intimate electrical contact between two electrodes. A preliminary contact switch was fabricated on a Si3N4 membrane using optical lithography, electron beam lithography and reactive ion etching. Its quasi-static operation was subsequently demonstrated.