Nano Science and Technology Institute
Nanotech 2004 Vol. 3
Nanotech 2004 Vol. 3
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 3
Chapter 4: Nano Devices and Systems

A Nanoscale Electromechanical Contact Switch for Logic Applications

Authors:C.C. Huang and K.L. Ekinci
Affilation:Boston University, US
Pages:187 - 189
Keywords:nano-electro-mechanical systems, nano-electro-mechanical switch, mechanical logic
Abstract:Here, we describe the operation of a nano-electro-mechanical contact switch. The switch design relies on a sharp contact tip integrated to a compliant nanomechanical beam. When the beam is actuated electrostatically, the tip establishes intimate electrical contact between two electrodes. A preliminary contact switch was fabricated on a Si3N4 membrane using optical lithography, electron beam lithography and reactive ion etching. Its quasi-static operation was subsequently demonstrated.
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