Nano Science and Technology Institute
Nanotech 2004 Vol. 3
Nanotech 2004 Vol. 3
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 3
Chapter 2: Nanoscale Electronics and Quantum Devices

Discontinuous Gold Films for Nanocell Memories

Authors:D.P. Nackashi, N.H. Di Spigna, D.A. Winick, C.J. Amsinck, L. Cheng, J.M. Tour and P.D. Franzon
Affilation:North Carolina State University, US
Pages:45 - 48
Keywords:molecular electronics, Volmer-Weber, self-assembled, integration
Abstract:An important component to the nanocell, among other self-assembled networks, is the fabrication of a framework by which molecular elements can be interconnected. This framework must be nanometric in scale, created in a material suitable for attachment chemistries and remain electrically discontinuous until molecular attachment. Utilizing the Volmer-Weber mechanism by which gold grows on silicon dioxide surfaces, nanometric islands of gold are fabricated to provide this framework. Using standard photolithography techniques, the regions where these islands are located are well defined. A two-layer photoresist stack is developed that prevents edge shorting around the boundaries of each region. The discontinuous gold films fabricated in this study are repeatable, offer a fill factor of 63%, and are easily patterned down to the one-micron scale.
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