Nano Science and Technology Institute
Nanotech 2004 Vol. 2
Nanotech 2004 Vol. 2
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2
Chapter 8: Computational Methods and Numerics

Design and Verification of an Electrostatic MEMS Simulator

Authors:V. Szekely, G. Bognar, M. Rencz, F. Ciontu, B. Charlot and B. Courtois
Affilation:Micred, HU
Pages:490 - 493
Keywords:electro-static simulator, MEMS simulation, field solvers
Abstract:Thermal solvers can be used for the simulation of electro-static problems as well, since the main equations to be solved are the same: the so-called field equation. There are numerous thermal solvers on the market, developed originally for the simulation of boards. These can be relatively easily used as electro-static solvers as well, but the electro static simulation requires the calculation of the vector type forces as well, for which no analogy exists in the thermal solvers. In this paper we present how thermal solvers can be extended to solve electro-static problems as well. The simulated results will be verified with results measured on realised MEMS structures.
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