Authors: F. Hausser and A. Voigt
Affilation: Research Center Caesar, Germany
Pages: 462 - 465
Keywords: homoepitaxy, adaptive finite elements, step flow model, thermal relaxation, anisotropy
The thermal relaxation of isolated (single layer) homoepitaxial islands and craters and of isolated nanomounds is simulated using a 2+1 dimensional step flow model. Numerical simulations based on adaptive finite elements are used to study the decay rates of these structures in the diffusion limited and the attachment- detachment limited regime under the influence of anisotropic effects.