Brenner M.P., Lang J.H., Li J., Slocum A.H.
Harvard University, US
Keywords: electrostatic actuator, optimal design
We describe a method for predicting the optimal design of an electrostatic zipper actuator. The shape of the zipping beam and the electrode are optimized to maximize the applied force at a given stroke, while satisfying fabrication constraints, and the constraint that the pull-in instability occurs for a given applied voltage.
Journal: TechConnect Briefs
Volume: 2, Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2
Published: March 7, 2004
Pages: 371 - 374
Industry sector: Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications
ISBN: 0-9728422-8-4