Nano Science and Technology Institute
Nanotech 2004 Vol. 2
Nanotech 2004 Vol. 2
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2
Chapter 7: Modeling Fundamental Phenomena in MEMS

Optimal Design of an Electrostatic Zipper Actuator

Authors:M.P. Brenner, J.H. Lang, J. Li and A.H. Slocum
Affilation:Harvard University, US
Pages:371 - 374
Keywords:optimal design, electrostatic actuator
Abstract:We describe a method for predicting the optimal design of an electrostatic zipper actuator. The shape of the zipping beam and the electrode are optimized to maximize the applied force at a given stroke, while satisfying fabrication constraints, and the constraint that the pull-in instability occurs for a given applied voltage.
Optimal Design of an Electrostatic Zipper ActuatorView PDF of paper
Order:Mail/Fax Form
© 2017 Nano Science and Technology Institute. All Rights Reserved.
Terms of Use | Privacy Policy | Contact Us | Site Map