Nanotech 2004 Vol. 2
Nanotech 2004 Vol. 2
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2

Modeling Fundamental Phenomena in MEMS Chapter 7

Optimal Design of an Electrostatic Zipper Actuator

Authors: M.P. Brenner, J.H. Lang, J. Li and A.H. Slocum

Affilation: Harvard University, United States

Pages: 371 - 374

Keywords: optimal design, electrostatic actuator

We describe a method for predicting the optimal design of an electrostatic zipper actuator. The shape of the zipping beam and the electrode are optimized to maximize the applied force at a given stroke, while satisfying fabrication constraints, and the constraint that the pull-in instability occurs for a given applied voltage.

Optimal Design of an Electrostatic Zipper Actuator

ISBN: 0-9728422-8-4
Pages: 519
Hardcopy: $79.95