Optimal Design of an Electrostatic Zipper Actuator

	Nanotech 2004 Vol. 2 Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2 Chapter 7: Modeling Fundamental Phenomena in MEMS
	Optimal Design of an Electrostatic Zipper Actuator
Authors:	M.P. Brenner, J.H. Lang, J. Li and A.H. Slocum
Affilation:	Harvard University, US
Pages:	371 - 374
Keywords:	optimal design, electrostatic actuator
Abstract:	We describe a method for predicting the optimal design of an electrostatic zipper actuator. The shape of the zipping beam and the electrode are optimized to maximize the applied force at a given stroke, while satisfying fabrication constraints, and the constraint that the pull-in instability occurs for a given applied voltage.
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ISBN:	0-9728422-8-4
Pages:	519
Hardcopy:	$79.95

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