Nano Science and Technology Institute
Nanotech 2004 Vol. 2
Nanotech 2004 Vol. 2
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2
Chapter 6: MEMS Modeling

Effective Modelling and Simulation of Over-Heated Actuators

Authors:M. Zubert, M. Napieralska, A. Napieralski and J.L. Noullet
Affilation:Technical University of Lodz, PL
Pages:359 - 362
Keywords:MEMS, over-heated actuator, polycrystalline silicon parameters, mono-dimensional model, RESCUER software
Abstract:A mono-dimensional model of an over heated actuator is presented in this paper. The proposed distributed models are derived based on real physical phenomena described by multi-dimensional partial differential equations. The proposed model has been prepared taking into account real polycrystalline silicon parameters and their thermal dependencies. The considerations are based on the previous device analysis and FEM simulation for the device operating in real working conditions in static and quasi-static mode.
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