Authors: M. Bails, J.A. Martinez, S.P. Levitan, I. Avdeev, M. Lovell and D.M. Chiarulli
Affilation: University of Pittsburgh, United States
Pages: 355 - 358
Keywords: MEMS, Modeling, Microsystem, FEM, RF Switch, Circuit Simulation
In this paper we demonstrate the capabilities of our system-level CAD tool, Chatoyant, to model and simulate an RF MEMS switch. Chatoyant is a mixed signal, multi-domain CAD tool that can be used to design and analyze complete mixed-technology micro-systems. We perform a system level simulation of an RF MEMS switch. This is accomplished by coupling mechanical and electrical domains of this system. We verify our mechanical results using the commercial simulation packages, ANSYS, and CoventorWare.