Nano Science and Technology Institute
Nanotech 2004 Vol. 2
Nanotech 2004 Vol. 2
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2
 
Chapter 6: MEMS Modeling
 

Simulation and Modeling of a Bridge-type Resonant Beam for a Coriolis True Mass Flow Sensor

Authors:S. Lee, X. Wang, W. Shin, Z. Xiao, K.K. Chin and K.R. Farmer
Affilation:Microelectronics Research Center, New Jersey Institute of Technology, US
Pages:351 - 354
Keywords:Resonant beam, Coriolis mass flow sensor, resonant frequency shift
Abstract:This paper presents a simulation of a bridge-type resonating beam connected to the tube loop structure of a Coriolis true mass flow sensor[1]. The resonant beam technique, which is comparable to optical[2], piezoresistive[3], and capacitive[4] detection methods, is used to detect the vertical amplitude change of the tube-loop structure according to the Coriolis force of true mass flow by measuring the frequency shift of the resonating beam. The focus of this paper will be on the frequency shift caused by the amplitude of the bending mode of vibration, and the electrostatic pull-in effect as a measurement method for the frequency shift.
Simulation and Modeling of a Bridge-type Resonant Beam for a Coriolis True Mass Flow SensorView PDF of paper
ISBN:0-9728422-8-4
Pages:519
Hardcopy:$79.95
 
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