Nano Science and Technology Institute
Nanotech 2004 Vol. 2
Nanotech 2004 Vol. 2
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2
Chapter 6: MEMS Modeling

Numerical Modeling of a Piezoelectric Micropump

Authors:R. Schlipf, K. Haghighi and R. Lange
Affilation:Purdue University, US
Pages:339 - 342
Keywords:FEA, numerical modeling, simulation, piezoelectric, micropump
Abstract:An effective description and an accurate understanding of any pumping mechanism is critical, especially of the micro scale. With the existence of a comprehensive and adaptable model, accurate preproduction predictions of performance are realized. Optimal geometries and operating parameters may be determined without the need for expensive prototyping. A three-dimensional FEA approach for parametric design and optimization of a piezoelectrically actuated membrane micropump is presented. The model includes the piezoelectric material, membrane, pumping chamber, and valves. This numerical representation includes electro-mechanical coupling for piezoelectric actuation as well as consideration of fluid-structural interaction. Transient consideration of electrical, mechanical, and fluidic effects is included. The effects of independent factors such as component geometry, backpressure, and excitation voltage and frequency are each evaluated. Results are obtained by using an iterative finite element procedure. Attempts in the literature show only a 2D pump, but results were not compared with experimental data (Nguyen, 2001) as well as two and three dimensional valve models which are not attached to an operational pump (Olsson, 2000). Outputs include membrane deflection, flow pattern and velocities, and volumetric flow rate. Results will be compared with experimental data available in the literature.
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