Nano Science and Technology Institute
Nanotech 2004 Vol. 2
Nanotech 2004 Vol. 2
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2
Chapter 6: MEMS Modeling

Function-Oriented Geometric Design Approach To Surface Micromachined MEMS

Authors:F. Gao and Y.S. Hong
Affilation:University of Toledo, US
Pages:319 - 322
Keywords:Structured Design Methodology, Solid Model, Geometric Design, Feature Modeling, Design for Manufacturing
Abstract:Geometric modeling is an important aspect of MEMS design. It not only creates geometric model for visual evaluation, but also supplies input for device performance analysis. This paper focuses on developing a feature-based geometric design methodology that enables designers to create fabrication-ready 3D models of MEMS devices without concerning the mask layout. Compared with present geometric design routine, which builds 3D device model through simulating the fabrication process from the photolithography masks, the function-oriented geometric design method allows designers to establish 3D model by using a set of pre-defined volumetric primitives associated with geometric constraints. The fabrication information is derived from corresponding function-oriented data specified by designers. Hence, designers are released from the down-stream fabrication planning, and can focus on creative design. This research is the application of feature modeling and constraint-based design to the micro world.
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