Nanotech 2004 Vol. 2
Nanotech 2004 Vol. 2
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2

MEMS Modeling Chapter 6

Dynamic Modeling and Input Shaping for MEMS

Authors: D.O. Popa, J.T. Wen, H.E. Stephanou, G. Skidmore and M. Ellis

Affilation: Rensselaer Polytechnic Institute, United States

Pages: 315 - 318

Keywords: input shaping, open loop control, vibration reduction

In this paper we show that the dynamic performance of MEMS devices can be significantly enhanced using reduced-order modeling techniques and open-loop control via input shaping. Specifically, we apply this methodology to a variety of thermally and electrostatically actuated microstructures, extending our recent results presented in [1]. Input shaping is a popular open-loop control method used primarily for vibration reduction in high precision and high speed positioning equipment [2]. This approach is particularly well suited in applications where positioning feedback signals are not available, and therefore it is very relevant for MEMS.

Dynamic Modeling and Input Shaping for MEMS

ISBN: 0-9728422-8-4
Pages: 519
Hardcopy: $79.95