Nano Science and Technology Institute
Nanotech 2004 Vol. 2
Nanotech 2004 Vol. 2
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2
Chapter 6: MEMS Modeling

Dynamic Modeling and Input Shaping for MEMS

Authors:D.O. Popa, J.T. Wen, H.E. Stephanou, G. Skidmore and M. Ellis
Affilation:Rensselaer Polytechnic Institute, US
Pages:315 - 318
Keywords:input shaping, open loop control, vibration reduction
Abstract:In this paper we show that the dynamic performance of MEMS devices can be significantly enhanced using reduced-order modeling techniques and open-loop control via input shaping. Specifically, we apply this methodology to a variety of thermally and electrostatically actuated microstructures, extending our recent results presented in [1]. Input shaping is a popular open-loop control method used primarily for vibration reduction in high precision and high speed positioning equipment [2]. This approach is particularly well suited in applications where positioning feedback signals are not available, and therefore it is very relevant for MEMS.
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