Nanotech 2004 Vol. 2
Nanotech 2004 Vol. 2
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2

MEMS Modeling Chapter 6

Dynamic Simulations of a Novel RF MEMS Switch

Authors: M.I. Younis, E.M. Abdel-Rahman and A.H. Nayfeh

Affilation: Virginia Tech, United States

Pages: 287 - 290

Keywords: RF MEMS switches, dynamic pull-in, DC and AC loading

We present a dynamic analysis of a novel RF MEMS switch utilizing the dynamic pull-in phenomenon. We study this phenomenon and present guidelines about its mechanism. We propose to utilize this phenomenon to design a novel RF MEMS switch, which can be actuated by a voltage load as low as 40% of the traditionally used static pull-in voltage. The switch is actuated using a combined DC and AC loading. The AC loading can be tuned by altering its amplitude and/or frequency to reach the pull-in instability with the lowest driving voltage and fastest response speed. The new actuation method can solve a major problem in the design of RF MEMS switches, which is the high deriving voltage requirement

Dynamic Simulations of a Novel RF MEMS Switch

ISBN: 0-9728422-8-4
Pages: 519
Hardcopy: $79.95