Dynamic Simulations of a Novel RF MEMS Switch

	Nanotech 2004 Vol. 2 Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2 Chapter 6: MEMS Modeling
	Dynamic Simulations of a Novel RF MEMS Switch
Authors:	M.I. Younis, E.M. Abdel-Rahman and A.H. Nayfeh
Affilation:	Virginia Tech, US
Pages:	287 - 290
Keywords:	RF MEMS switches, dynamic pull-in, DC and AC loading
Abstract:	We present a dynamic analysis of a novel RF MEMS switch utilizing the dynamic pull-in phenomenon. We study this phenomenon and present guidelines about its mechanism. We propose to utilize this phenomenon to design a novel RF MEMS switch, which can be actuated by a voltage load as low as 40% of the traditionally used static pull-in voltage. The switch is actuated using a combined DC and AC loading. The AC loading can be tuned by altering its amplitude and/or frequency to reach the pull-in instability with the lowest driving voltage and fastest response speed. The new actuation method can solve a major problem in the design of RF MEMS switches, which is the high deriving voltage requirement
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ISBN:	0-9728422-8-4
Pages:	519
Hardcopy:	$79.95

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