Piecewise Perturbation Method (PPM) Simulation of Electrostatically Actuated Beam with Uncertain Stiffness

	Nanotech 2004 Vol. 2 Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2 Chapter 6: MEMS Modeling
	Piecewise Perturbation Method (PPM) Simulation of Electrostatically Actuated Beam with Uncertain Stiffness
Authors:	J. Juillard, H. Baili and E. Colinet
Affilation:	SUPELEC, Department of Measurement, FR
Pages:	283 - 286
Keywords:	uncertainties, simulation, perturbation
Abstract:	We present a new approach to the simulation of uncertainties in micro-electromechanical systems, based on the same principle as perturbation methods. This approach is valid for large variations of the uncertainties and requires much less simulations than a Monte-Carlo method. An implementation in the case of an electrostatically actuated beam with uncertain stiffness is presented and compared with obtained with Monte-Carlo.
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ISBN:	0-9728422-8-4
Pages:	519
Hardcopy:	$79.95

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