Nano Science and Technology Institute
Nanotech 2004 Vol. 2
Nanotech 2004 Vol. 2
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2
 
Chapter 6: MEMS Modeling
 

Finite Element Validation of an Inverse Approach to the Design of an Electrostatic Actuator

Authors:J. Juillard, M. Cristescu and S. Guessab
Affilation:SUPELEC, Department of Measurement, FR
Pages:275 - 278
Keywords:MEMS design, optimization, coupled-field problems
Abstract:We present an approach to the design of electrostatically-actuated micro-structures and discuss its implementation in a software tool called IDEA. The main advantage of this approach is that it considerably reduces problems associated to coupling and to large-displacement non-linearities. The results obtained with IDEA are then compared with ANSYS simulations of an electrostatic micro-mirror.
Finite Element Validation of an Inverse Approach to the Design of an Electrostatic ActuatorView PDF of paper
ISBN:0-9728422-8-4
Pages:519
Hardcopy:$79.95
 
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