 | Nanotech 2004 Vol. 2
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2
Chapter 6: MEMS Modeling |
| | Finite Element Validation of an Inverse Approach to the Design of an Electrostatic Actuator |
| Authors: | J. Juillard, M. Cristescu and S. Guessab |
| Affilation: | SUPELEC, Department of Measurement, FR |
| Pages: | 275 - 278 |
| Keywords: | MEMS design, optimization, coupled-field problems |
| Abstract: | We present an approach to the design of electrostatically-actuated micro-structures and discuss its implementation in a software tool called IDEA. The main advantage of this approach is that it considerably reduces problems associated to coupling and to large-displacement non-linearities. The results obtained with IDEA are then compared with ANSYS simulations of an electrostatic micro-mirror. |
| ISBN: | 0-9728422-8-4 |
| Pages: | 519 |
| Hardcopy: | $150.00 |
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