Nano Science and Technology Institute
Nanotech 2004 Vol. 2
Nanotech 2004 Vol. 2
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2
Chapter 6: MEMS Modeling

Analytical Model for the Pull-in Time of Low-Q MEMS Devices

Authors:L.A. Rocha, E. Cretu and R.F. Wollfenbuttel
Affilation:Delft University of Technology, NL
Pages:271 - 274
Keywords:pull-in, MEMS dynamics, squeeze film damping, large-signal analysis
Abstract:A meta-stable transient region just beyond pull-in displacement that ultimately governs the pull-in time in critically damped systems is identified in this paper. Since the pull-in displacement time is basically governed by this second region (almost 90% of the pull-in time), the modeling of this region largely determines the reliability of the overall calculation of the pull-in dynamic transition. An analytical model for this region is derived and compared with measurements. The model accuracy, despite its simplicity, makes it a valuable tool for the design of MEMS switches outside vacuum and for sensors based on measuring pull-in time.
Analytical Model for the Pull-in Time of Low-Q MEMS DevicesView PDF of paper
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