Nano Science and Technology Institute
Nanotech 2004 Vol. 2
Nanotech 2004 Vol. 2
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2
Chapter 6: MEMS Modeling

A New 3D Model of The Electro-Mechanical Response of Piezoelectric Structures

Authors:D. Elata, E. Elka and H. Abramovich
Affilation:Technion - Israel Institute of Technology, IL
Pages:267 - 270
Keywords:piezoelectric, multimorphs actuators, electromechanical coupling
Abstract:The constitutive equations of multi-layered piezoelectric structures are derived in a new form. In this form, the electromechanical coupling is presented as an additional stiffness matrix. This matrix is a true property of the piezoelectric structure and is independent of specific mechanical boundary conditions that may apply to the structure. A novel model of the electromechanical response of such structures is presented. This model accounts for the 3D kinematics of the structure deformation. Solution of example problems using the new model shows excellent agreement with full 3D finite element simulations. These solutions are also compared with the results of previous 2D model approximations presented in literature, and the inaccuracies associated with these previous models are discussed.
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