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 | Nanotech 2004 Vol. 2
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2
Chapter 6: MEMS Modeling |
| | Design and Modeling of a 3D Micromachined Accelerometer | | Authors: | S.H. Ghafari, M.F. Golnaraghi and R. Mansour | | Affilation: | University of Waterloo, CA | | Pages: | 259 - 262 | | Keywords: | accelerometer, inertial sensors, silicon sensors, micromachining, micro-fabrication technology | | Abstract: | This paper presents the operation principles, modeling methods, design, and fabrication considerations of a 3-D micromachined accelerometer. MEMS technology in this work combines small size, low cost and low power consumption to create a sensor that is suitable for wide usage in different applications such as automotive industry and inertial navigation systems. | | ISBN: | 0-9728422-8-4 |
| Pages: | 519 |
| Hardcopy: | $150.00 |
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