Nano Science and Technology Institute
Nanotech 2004 Vol. 2
Nanotech 2004 Vol. 2
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2
Chapter 6: MEMS Modeling

Design and Modeling of a 3D Micromachined Accelerometer

Authors:S.H. Ghafari, M.F. Golnaraghi and R. Mansour
Affilation:University of Waterloo, CA
Pages:259 - 262
Keywords:accelerometer, inertial sensors, silicon sensors, micromachining, micro-fabrication technology
Abstract:This paper presents the operation principles, modeling methods, design, and fabrication considerations of a 3-D micromachined accelerometer. MEMS technology in this work combines small size, low cost and low power consumption to create a sensor that is suitable for wide usage in different applications such as automotive industry and inertial navigation systems.
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