Nanotech 2004 Vol. 2
Nanotech 2004 Vol. 2
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2

MEMS Modeling Chapter 6

Design and Modeling of a 3D Micromachined Accelerometer

Authors: S.H. Ghafari, M.F. Golnaraghi and R. Mansour

Affilation: University of Waterloo, Canada

Pages: 259 - 262

Keywords: accelerometer, inertial sensors, silicon sensors, micromachining, micro-fabrication technology

Abstract:
This paper presents the operation principles, modeling methods, design, and fabrication considerations of a 3-D micromachined accelerometer. MEMS technology in this work combines small size, low cost and low power consumption to create a sensor that is suitable for wide usage in different applications such as automotive industry and inertial navigation systems.

Design and Modeling of a 3D Micromachined Accelerometer

ISBN: 0-9728422-8-4
Pages: 519
Hardcopy: $79.95