Design and Modeling of a 3D Micromachined Accelerometer

	Nanotech 2004 Vol. 2 Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2 Chapter 6: MEMS Modeling
	Design and Modeling of a 3D Micromachined Accelerometer
Authors:	S.H. Ghafari, M.F. Golnaraghi and R. Mansour
Affilation:	University of Waterloo, CA
Pages:	259 - 262
Keywords:	accelerometer, inertial sensors, silicon sensors, micromachining, micro-fabrication technology
Abstract:	This paper presents the operation principles, modeling methods, design, and fabrication considerations of a 3-D micromachined accelerometer. MEMS technology in this work combines small size, low cost and low power consumption to create a sensor that is suitable for wide usage in different applications such as automotive industry and inertial navigation systems.
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ISBN:	0-9728422-8-4
Pages:	519
Hardcopy:	$79.95

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