Nanotech 2004 Vol. 2
Nanotech 2004 Vol. 2
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2

MEMS Modeling Chapter 6

Dynamic Simulation of an Electrostatically Actuated Impact Microactuator

Authors: X. Zhao, H. Dankowicz, C.K. Reddy and A.H. Nayfeh

Affilation: Virginia Tech, United States

Pages: 247 - 250

Keywords: microactuators, electrostatic, impact, dynamic simulation

Abstract:
We study the dynamics of an electrostatically driven impact microactuator reported by Mita and associates. The microactuator is modeled as a two-degree-of-freedom rigid multibody system. The impact phenomenon is described by a simple impact law based on Newton’s coefficient of restitution. The system dynamics is intensively studied. We investigate the influence of various parameters including excitation frequency and voltage.

Dynamic Simulation of an Electrostatically Actuated Impact Microactuator

ISBN: 0-9728422-8-4
Pages: 519
Hardcopy: $79.95