Nano Science and Technology Institute
Nanotech 2004 Vol. 2
Nanotech 2004 Vol. 2
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2
 
Chapter 6: MEMS Modeling
 

Dynamic Simulation of an Electrostatically Actuated Impact Microactuator

Authors:X. Zhao, H. Dankowicz, C.K. Reddy and A.H. Nayfeh
Affilation:Virginia Tech, US
Pages:247 - 250
Keywords:microactuators, electrostatic, impact, dynamic simulation
Abstract:We study the dynamics of an electrostatically driven impact microactuator reported by Mita and associates. The microactuator is modeled as a two-degree-of-freedom rigid multibody system. The impact phenomenon is described by a simple impact law based on Newton’s coefficient of restitution. The system dynamics is intensively studied. We investigate the influence of various parameters including excitation frequency and voltage.
Dynamic Simulation of an Electrostatically Actuated Impact MicroactuatorView PDF of paper
ISBN:0-9728422-8-4
Pages:519
Hardcopy:$79.95
 
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