Dynamic Simulation of an Electrostatically Actuated Impact Microactuator

	Nanotech 2004 Vol. 2 Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2 Chapter 6: MEMS Modeling
	Dynamic Simulation of an Electrostatically Actuated Impact Microactuator
Authors:	X. Zhao, H. Dankowicz, C.K. Reddy and A.H. Nayfeh
Affilation:	Virginia Tech, US
Pages:	247 - 250
Keywords:	microactuators, electrostatic, impact, dynamic simulation
Abstract:	We study the dynamics of an electrostatically driven impact microactuator reported by Mita and associates. The microactuator is modeled as a two-degree-of-freedom rigid multibody system. The impact phenomenon is described by a simple impact law based on Newton’s coefficient of restitution. The system dynamics is intensively studied. We investigate the influence of various parameters including excitation frequency and voltage.
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ISBN:	0-9728422-8-4
Pages:	519
Hardcopy:	$79.95

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