Nano Science and Technology Institute
Nanotech 2004 Vol. 2
Nanotech 2004 Vol. 2
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2
Chapter 6: MEMS Modeling

Dynamic Simulation of an Electrostatically Actuated Impact Microactuator

Authors:X. Zhao, H. Dankowicz, C.K. Reddy and A.H. Nayfeh
Affilation:Virginia Tech, US
Pages:247 - 250
Keywords:microactuators, electrostatic, impact, dynamic simulation
Abstract:We study the dynamics of an electrostatically driven impact microactuator reported by Mita and associates. The microactuator is modeled as a two-degree-of-freedom rigid multibody system. The impact phenomenon is described by a simple impact law based on Newton’s coefficient of restitution. The system dynamics is intensively studied. We investigate the influence of various parameters including excitation frequency and voltage.
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