Papers:
Free Surface Flow and Acousto-Elastic Interaction in Piezo Inkjet
Modeling plays an essential role in our research on new inkjet technologies. Structural modeling with Ansys includes piezo-electricity. Acoustic modeling in Ansys and Matlab involves fluid-structure interaction. CFD modeling with Flow3D includes wall-flexibility and free [...]
Contact Force Models, including Electric Contact Deformation, for Electrostatically Actuated, Cantilever-Style, RF MEMS Switches
Electrostatically actuated, cantilever-style, metal contact, radio frequency (RF), microelectromechanical systems (MEMS) switches depend on having adequate contact force to achieve desired, low contact resistance. In this study, contact force equations that account for beam tip [...]
Electromechanical Buckling of a Pre-Stressed Layer Bonded to an Elastic Foundation
The electromechanical buckling of a pre-stressed layer bonded to an elastic foundation is analyzed. A new analytic solution of the mechanical post-buckling is presented. In addition, it is shown that electrostatic forces can precipitately instigate [...]
Three-Dimensional CFD-Simulation of a Thermal Bubble Jet Printhead
This paper reports on a three-dimensional simulation of a commercial, thermally actuated bubble jet printhead using an appropriate pressure boundary condition for the bubble nucleation and expansion. The ink jet system has been used as [...]
Circuit Modeling and Simulation of Integrated Microfluidic Systems
A combined circuit-device model for the analysis of integrated microfluidic system is presented. The complete model of an integrated microfluidic device incorporates modeling of the fluidic transport, chemical reaction, reagent mixing and separation. The microfluidic [...]
Extending the Validity of Existing Squeezed-Film Damper Models with Elongations of Surface Dimensions
Border flow effects in squeezed-film dampers having a gap separation comparable with the surface dimensions are studied with 2D and 3D FEM simulations and with analytic models derived from the linearized Reynolds equation for small [...]
Feature Length-Scale Modeling of LPCVD and PECVD MEMS Fabrication Processes
The surface micromachining processes used to manufacture MEMS devices and integrated circuits transpire at such small length scales and are sufficiently complex that theoretical analysis of them is particularly inviting. Under development at Sandia National [...]
Compact Models for Squeeze-Film Damping in the Slip Flow Regime
We propose a mixed-level simulation scheme for squeeze film damping effects in microdevices, which makes it possible to include damping effects in system-level models of entire microsystems in a natural, physically-based and flexible way. Our [...]
Dynamic Simulation of an Electrostatically Actuated Impact Microactuator
We study the dynamics of an electrostatically driven impact microactuator reported by Mita and associates. The microactuator is modeled as a two-degree-of-freedom rigid multibody system. The impact phenomenon is described by a simple impact law [...]
Microplate Modeling under Coupled Structural-Fluidic-Electrostatic Forces
We present a model for the dynamic behavior of microplates under the coupled effects of squeeze-film damping, electrostatic actuation, and mechanical forces. The model simulates the dynamics of microplates and predicts their quality factors under [...]
A Model for Thermoelastic Damping in Microplates
We present a model and analytical expressions for the quality factors of microplates due to thermoelastic damping. We solve the heat equation for the thermal current across the thickness of a microplate, and hence decouple [...]
Design and Modeling of a 3D Micromachined Accelerometer
This paper presents the operation principles, modeling methods, design, and fabrication considerations of a 3-D micromachined accelerometer. MEMS technology in this work combines small size, low cost and low power consumption to create a sensor [...]
Effect of Thermophysical Property Variations on Surface Micromachined Polysilicon Beam Flexure Actuators
Electrically heated, thermally driven, surface micromachined polysilicon beam flexure thermal actuators have been investigated using analytical methods that employ constant material properties either taken at room temperature or based on a set of averaged temperatures [...]
A New 3D Model of The Electro-Mechanical Response of Piezoelectric Structures
The constitutive equations of multi-layered piezoelectric structures are derived in a new form. In this form, the electromechanical coupling is presented as an additional stiffness matrix. This matrix is a true property of the piezoelectric [...]
Analytical Model for the Pull-in Time of Low-Q MEMS Devices
A meta-stable transient region just beyond pull-in displacement that ultimately governs the pull-in time in critically damped systems is identified in this paper. Since the pull-in displacement time is basically governed by this second region [...]
Finite Element Validation of an Inverse Approach to the Design of an Electrostatic Actuator
We present an approach to the design of electrostatically-actuated micro-structures and discuss its implementation in a software tool called IDEA. The main advantage of this approach is that it considerably reduces problems associated to coupling [...]
mor4ansys: Generating Compact Models Directly From ANSYS Models
Model reduction of linear large-scale dynamic systems is already quite an established area [1]–[3]. In a number of papers (see references in [3]), the advantages of model reduction have been demonstrated. In the present paper, [...]
Piecewise Perturbation Method (PPM) Simulation of Electrostatically Actuated Beam with Uncertain Stiffness
We present a new approach to the simulation of uncertainties in micro-electromechanical systems, based on the same principle as perturbation methods. This approach is valid for large variations of the uncertainties and requires much less [...]
Dynamic Simulations of a Novel RF MEMS Switch
We present a dynamic analysis of a novel RF MEMS switch utilizing the dynamic pull-in phenomenon. We study this phenomenon and present guidelines about its mechanism. We propose to utilize this phenomenon to design a [...]
Using Topology Derived Masks to Facilitate 3D Design
To accelerate MEMS design for surface micromachining applications, an algorithm and associated design tool have been created which translates designers’ 3D models into 2D lithographic production masks. Typically, designing a surface micromachined, MEMS device requires [...]
Modeling, Fabrication and Experiment of a Novel Lateral MEMS IF/RF Filter
MEMS based mechanical resonators and filters have shown promising characteristics in achieving high Q values and good stability. This paper introduces a novel V-shape coupling element that is used to mechanically couple two clamped-clamped MEMS [...]
Characterization of an Electro-thermal Microactuator with Multi-lateral Motion in Plane
We present a new electro-thermal microactuator to have multi-lateral motion in plane by only varying voltage potentials at the contact pads. To extend the operating function, the larger operating range or multi-mode switch, relay and [...]
MEMS Compact Modeling Meets Model Order Reduction: Examples of the Application of Arnoldi Methods to Microsystem Devices
Lienemann J., Billger D., Rudnyi E.B., Greiner A., Korvink J.G., IMTEK, Albert Ludwig University, DE
Modeling and simulation of the behavior of a system consisting of many single devices is an essential requirement for the reduction of design cycles in the development of microsystem applications. Analytic solutions for the describing [...]
Guidelines of Creating Krylov-subspace Macromodels for Lateral Viscous Damping Effects
It is well known that modeling 3-D lateral viscous damping effects requires considerable computational resources. Therefore, earlier works on lateral viscous damping were based on the 1-D analytical Stokes and Couette flow solutions [1,2]. Recently, [...]
Computationally Efficient Dynamic Modeling of MEMS
Popa D.O., Critchley J., Sadowski M., Anderson K.S., Skidmore G., Rensselaer Polytechnic Institute, US
Traditional modeling work in MEMS includes simplified PDE/ODE formulation, based on physical principles, and Finite Element Analysis. More recently, reduced order modeling techniques using Krylov subspace decomposition have been proposed in the context of nodal [...]
Dynamic Modeling and Input Shaping for MEMS
In this paper we show that the dynamic performance of MEMS devices can be significantly enhanced using reduced-order modeling techniques and open-loop control via input shaping. Specifically, we apply this methodology to a variety of [...]
Function-Oriented Geometric Design Approach To Surface Micromachined MEMS
Geometric modeling is an important aspect of MEMS design. It not only creates geometric model for visual evaluation, but also supplies input for device performance analysis. This paper focuses on developing a feature-based geometric design [...]
New Accurate 3-D Finite Element Technology for Solving Geometrically Complex Coupled-Field Problems
Increased functionality of microelectromechanical systems (MEMS) has lead to the development of micro-scale devices that are geometrically complex. These complex configurations require the development of new and more efficient finite element (FE) techniques for modeling [...]
Interdigitated Low-Loss Ohmic RF-MEMS Switches
An interdigitated design for MEMS RF-switches is applied to both a shunt and a series ohmic contact configuration. Interdigitated Al-Ti-TiN RF-signal paths and poly actuation electrodes are arranged underneath an electrodeposited gold plate, suspended by [...]
Compliant Force Amplifier Mechanisms for Surface Micromachined Resonant Accelerometers
The present work deals with the optimization of a compliant force amplifier mechanism in a surface micromachined resonant accelerometer. Figures of merit including noise floor and scale factor are critically dependent on the gain of [...]
Coupling Of Resonant Modes In Micromechanical Vibratory Rate Gyroscopes
Analytical models are presented to describe the resonant modal coupling behaviour of z-axis micromechanical vibratory rate gyroscopes fabricated in an integrated polysilicon surface micromachining process. The models are then applied to predict the extent of [...]
Numerical Modeling of a Piezoelectric Micropump
An effective description and an accurate understanding of any pumping mechanism is critical, especially of the micro scale. With the existence of a comprehensive and adaptable model, accurate preproduction predictions of performance are realized. Optimal [...]
Identification of Anisoelasticity and Nonproportional Damping in MEMS Gyroscopes
A novel approach to identify nonproportional damping and structural anisoelasticities in vibratory MEMS gyroscopes is proposed in this paper. The proposed identification method is based on measured vibration data in the form of frequency response [...]
On the Air Damping of Micro-Resonators in the Free-Molecular Region
Predicting air damping on micromachined mechanical resonators is crucial in the design of high-performance filters used in wireless communication systems. In the past, most of the work focused on devices with minimum feature size on [...]
Simulation and Modeling of a Bridge-type Resonant Beam for a Coriolis True Mass Flow Sensor
Lee S., Wang X., Shin W., Xiao Z., Chin K.K., Farmer K.R., Microelectronics Research Center, New Jersey Institute of Technology, US
This paper presents a simulation of a bridge-type resonating beam connected to the tube loop structure of a Coriolis true mass flow sensor[1]. The resonant beam technique, which is comparable to optical[2], piezoresistive[3], and capacitive[4] [...]
Computational Prototyping of an RF MEMS Switch using Chatoyant
Bails M., Martinez J.A., Levitan S.P., Avdeev I., Lovell M., Chiarulli D.M., University of Pittsburgh, US
In this paper we demonstrate the capabilities of our system-level CAD tool, Chatoyant, to model and simulate an RF MEMS switch. Chatoyant is a mixed signal, multi-domain CAD tool that can be used to design [...]
Effective Modelling and Simulation of Over-Heated Actuators
A mono-dimensional model of an over heated actuator is presented in this paper. The proposed distributed models are derived based on real physical phenomena described by multi-dimensional partial differential equations. The proposed model has been [...]
Static and Dynamic Optical Metrology of Micro-Mirror Thermal Deformation
Forest C.R., Reynolds-Brown P., Blum Spahn O., Harris J., Novak E., Wong C.C., Mani S., Peter F., Adams D., Sandia National Laboratories, US
A two-position micro-optical switch is being developed at Sandia National Laboratories. This MEMS device is shown in Figure 1 as a gear with a through-hole; the actuation mechanism is not shown. In the "on" position, [...]
Journal: TechConnect Briefs
Volume: 2, Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2
Published: March 7, 2004
Industry sector: Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications
ISBN: 0-9728422-8-4