MEMS Modeling

	Nanotech 2004 Vol. 2 Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2 Chapter 6: MEMS Modeling
-	Free Surface Flow and Acousto-Elastic Interaction in Piezo Inkjet
	H. Wijshoff
	Océ Technologies B.V., NL
-	Contact Force Models, including Electric Contact Deformation, for Electrostatically Actuated, Cantilever-Style, RF MEMS Switches
	R.A. Coutu_Jr. and P.E. Kladitis
	Air Force Institute of Technology, US
-	Electromechanical Buckling of a Pre-Stressed Layer Bonded to an Elastic Foundation
	S. Abu-Salih and D. Elata
	Technion - Israel Institute of Technology, IL
-	Three-Dimensional CFD-Simulation of a Thermal Bubble Jet Printhead
	T. Lindemann, D. Sassano, A. Bellone, R. Zengerle and P. Koltay
	University of Freiburg, DE
-	Circuit Modeling and Simulation of Integrated Microfluidic Systems
	A.N. Chatterjee and N.R. Aluru
	Beckman Institute, US
-	Extending the Validity of Existing Squeezed-Film Damper Models with Elongations of Surface Dimensions
	T. Veijola, A. Pursula and P. Raback
	Helsinki University of Technology, FI
-	Feature Length-Scale Modeling of LPCVD and PECVD MEMS Fabrication Processes
	L.C. Musson, P. Ho, S.J. Plimpton and R.C. Schmidt
	Sandia National Laboratories, US
-	Compact Models for Squeeze-Film Damping in the Slip Flow Regime
	R. Sattler and G. Wachutka
	Technical Univeristy of Münich, DE
-	Dynamic Simulation of an Electrostatically Actuated Impact Microactuator
	X. Zhao, H. Dankowicz, C.K. Reddy and A.H. Nayfeh
	Virginia Tech, US
-	Microplate Modeling under Coupled Structural-Fluidic-Electrostatic Forces
	M.I. Younis and A.H. Nayfeh
	Virginia Tech, US
-	A Model for Thermoelastic Damping in Microplates
	A.H. Nayfeh and M.I. Younis
	Virginia Tech, US
-	Design and Modeling of a 3D Micromachined Accelerometer
	S.H. Ghafari, M.F. Golnaraghi and R. Mansour
	University of Waterloo, CA
-	Effect of Thermophysical Property Variations on Surface Micromachined Polysilicon Beam Flexure Actuators
	A. Atre and S. Boedo
	Rochester Institute of Technology, US
-	A New 3D Model of The Electro-Mechanical Response of Piezoelectric Structures
	D. Elata, E. Elka and H. Abramovich
	Technion - Israel Institute of Technology, IL
-	Analytical Model for the Pull-in Time of Low-Q MEMS Devices
	L.A. Rocha, E. Cretu and R.F. Wollfenbuttel
	Delft University of Technology, NL
-	Finite Element Validation of an Inverse Approach to the Design of an Electrostatic Actuator
	J. Juillard, M. Cristescu and S. Guessab
	SUPELEC, Department of Measurement, FR
-	mor4ansys: Generating Compact Models Directly From ANSYS Models
	E.B. Rudnyi, J. Lienemann, A. Greiner and J.G. Korvink
	IMTEK, Albert Ludwig University, DE
-	Piecewise Perturbation Method (PPM) Simulation of Electrostatically Actuated Beam with Uncertain Stiffness
	J. Juillard, H. Baili and E. Colinet
	SUPELEC, Department of Measurement, FR
-	Dynamic Simulations of a Novel RF MEMS Switch
	M.I. Younis, E.M. Abdel-Rahman and A.H. Nayfeh
	Virginia Tech, US
-	Using Topology Derived Masks to Facilitate 3D Design
	R. Schiek and R. Schmidt
	Sandia National Laboratories, US
-	Modeling, Fabrication and Experiment of a Novel Lateral MEMS IF/RF Filter
	M. Motiee, A. Khajepour and R.R. Mansour
	University of Waterloo, CA
-	Characterization of an Electro-thermal Microactuator with Multi-lateral Motion in Plane
	C.H. Pan, Y.K. Chen and C.L. Chang
	National Chin-Yi Institute of Technology, TW
-	MEMS Compact Modeling Meets Model Order Reduction: Examples of the Application of Arnoldi Methods to Microsystem Devices
	J. Lienemann, D. Billger, E.B. Rudnyi, A. Greiner and J.G. Korvink
	IMTEK, Albert Ludwig University, DE
-	Guidelines of Creating Krylov-subspace Macromodels for Lateral Viscous Damping Effects
	P-C Yen and Y-J Yang
	National Taiwan University, TW
-	Computationally Efficient Dynamic Modeling of MEMS
	D.O. Popa, J. Critchley, M. Sadowski, K.S. Anderson and G. Skidmore
	Rensselaer Polytechnic Institute, US
-	Dynamic Modeling and Input Shaping for MEMS
	D.O. Popa, J.T. Wen, H.E. Stephanou, G. Skidmore and M. Ellis
	Rensselaer Polytechnic Institute, US
-	Function-Oriented Geometric Design Approach To Surface Micromachined MEMS
	F. Gao and Y.S. Hong
	University of Toledo, US
-	New Accurate 3-D Finite Element Technology for Solving Geometrically Complex Coupled-Field Problems
	I. Avdeev, M. Gyimesi, M. Lovell and D. Ostergaard
	University of Pittsburgh, US
-	Interdigitated Low-Loss Ohmic RF-MEMS Switches
	R. Gaddi, M. Bellei, A. Gnudi, B. Margesin and F. Giacomozzi
	ARCES - University of Bologna, IT
-	Compliant Force Amplifier Mechanisms for Surface Micromachined Resonant Accelerometers
	C.B.W. Pedersen and A.A. Seshia
	University of Cambridge, UK
-	Coupling Of Resonant Modes In Micromechanical Vibratory Rate Gyroscopes
	A.S. Phani, A.A. Seshia, M. Palaniapan, R.T. Howe and J. Yasaitis
	University of Cambridge, UK
-	Numerical Modeling of a Piezoelectric Micropump
	R. Schlipf, K. Haghighi and R. Lange
	Purdue University, US
-	Identification of Anisoelasticity and Nonproportional Damping in MEMS Gyroscopes
	A.S. Phani and A.A. Seshia
	University of Cambridge, UK
-	On the Air Damping of Micro-Resonators in the Free-Molecular Region
	S. Hutcherson and W. Ye
	Georgia Institute of Technology, US
-	Simulation and Modeling of a Bridge-type Resonant Beam for a Coriolis True Mass Flow Sensor
	S. Lee, X. Wang, W. Shin, Z. Xiao, K.K. Chin and K.R. Farmer
	Microelectronics Research Center, New Jersey Institute of Technology, US
-	Computational Prototyping of an RF MEMS Switch using Chatoyant
	M. Bails, J.A. Martinez, S.P. Levitan, I. Avdeev, M. Lovell and D.M. Chiarulli
	University of Pittsburgh, US
-	Effective Modelling and Simulation of Over-Heated Actuators
	M. Zubert, M. Napieralska, A. Napieralski and J.L. Noullet
	Technical University of Lodz, PL
-	Static and Dynamic Optical Metrology of Micro-Mirror Thermal Deformation
	C.R. Forest, P. Reynolds-Brown, O. Blum Spahn, J. Harris, E. Novak, C.C. Wong, S. Mani, F. Peter and D. Adams
	Sandia National Laboratories, US
ISBN:	0-9728422-8-4
Pages:	519
Hardcopy:	$79.95

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