Nano Science and Technology Institute
Nanotech 2004 Vol. 1
Nanotech 2004 Vol. 1
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 1
Chapter 9: Smart MEMS and Sensor Systems

Macromodel of Intelligent Sensor Structure with Accelometer

Authors:M. Husak, J. Jakovenko, P. Kulha, J. Novak and V. Janicek
Affilation:Czech Technical University in Prague, CZ
Pages:434 - 437
Keywords:accelerometer, tiltmeter, microsystem, interface, microprocessor
Abstract:The paper describes conceptual approach to the design of a tilt structure determined for integration on a chip. An accelerometer for measurement of inclination in x and y axes is used as a sensor. There is described approach to the development of functional and system model of the structure. A hardware model has been developed for verification of properties. Model properties have been simulated using simulators of electronic circuits. Basic parts of the hardware model are: accelerometer, microprocessor, interface. The system is temperature-compensated. The values of referential position are set automatically.
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