Nanotech 2004 Vol. 1
Nanotech 2004 Vol. 1
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 1

Smart MEMS and Sensor Systems Chapter 9

Electrostatic Tuning of a Micro-Ring Gyroscope

Authors: B.J. Gallacher, J. Hedley, J.S. Burdess, A.J. Harris, A. Rickard and D. King

Affilation: Insat University of Newcastle, United Kingdom

Pages: 430 - 433

Keywords: electrostatic, gyroscope, tuning, ring

This paper describes a procedure for identifying and correcting anisoinertia and anisoelasticity present in a micro-ring gyroscope. The major disadvantages of popular tuning methods such as mass trimming using laser ablation or focussed ion beam is that it can only be employed prior to packaging. Therefore tuning to correct for environmental or structural changes during operation is not possible. However, electrostatic tuning may be implemented on-chip during operation thus enabling active tuning. Furthermore, mass trimming procedures introduce a degree of damage to the structure, which may reduce the intrinsic high quality factor desirable in the ring gyroscope.

Electrostatic Tuning of a Micro-Ring Gyroscope

ISBN: 0-9728422-7-6
Pages: 521
Hardcopy: $79.95