Nano Science and Technology Institute
Nanotech 2004 Vol. 1
Nanotech 2004 Vol. 1
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 1
Chapter 8: MEMS Design and Application

Practical Techniques for Measuring MEMS Properties

Authors:J.V. Clark, D. Garmire, M. Last, J. Demmel and S. Govindjee
Affilation:Berkeley Sensor and Actuator Center, US
Pages:402 - 405
Keywords:MEMS modeling, parameter extraction, properties, test structures
Abstract:We describe simple test structures and practical analysis techniques to measure properties of MEMS devices. Our structures are designed to test many quantities using simple electric probes in a minimal chip area. We analyze differences between the geometry as fabricated and in layout, as well as differences between simulated and actual performance. We validate our electrical measurements using optical tools, and use the measured properties in CAD models to predict the performance of more complex designs.
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