Nano Science and Technology Institute
Nanotech 2004 Vol. 1
Nanotech 2004 Vol. 1
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 1
 
Chapter 8: MEMS Design and Application
 

Device Characterization at the Wafer Level via Optical Actuation and Detection

Authors:J. Hedley, J.S. Burdess, A.J. Harris and B.J. Gallacher
Affilation:Newcastle University, UK
Pages:394 - 397
Keywords:optical, actuation, MEMS, characterization
Abstract:This paper investigates the technique of optical actuation of MEMS. It is shown that a device can be driven into all of its vibrational modes simply and non-destructively by a laser pulse, making this an ideal actuation methodology for device characterization at the wafer level. This actuation method is shown to be comparable to a mechanical impulse actuation.
Device Characterization at the Wafer Level via Optical Actuation and DetectionView PDF of paper
ISBN:0-9728422-7-6
Pages:521
Hardcopy:$79.95
 
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