Device Characterization at the Wafer Level via Optical Actuation and Detection

	Nanotech 2004 Vol. 1 Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 1 Chapter 8: MEMS Design and Application
	Device Characterization at the Wafer Level via Optical Actuation and Detection
Authors:	J. Hedley, J.S. Burdess, A.J. Harris and B.J. Gallacher
Affilation:	Newcastle University, UK
Pages:	394 - 397
Keywords:	optical, actuation, MEMS, characterization
Abstract:	This paper investigates the technique of optical actuation of MEMS. It is shown that a device can be driven into all of its vibrational modes simply and non-destructively by a laser pulse, making this an ideal actuation methodology for device characterization at the wafer level. This actuation method is shown to be comparable to a mechanical impulse actuation.
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ISBN:	0-9728422-7-6
Pages:	521
Hardcopy:	$79.95

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