Nano Science and Technology Institute
Nanotech 2004 Vol. 1
Nanotech 2004 Vol. 1
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 1
Chapter 8: MEMS Design and Application

Novel Monolithic Micro Droplet Generator

Authors:C.K. Chung, C.J. Lin, C.C. Chen, S.W. Chuang, Y.J. Fang and Y.Z. Hong
Affilation:National Cheng Kung University, TW
Pages:367 - 370
Keywords:monolithic, droplet generator, SU8, MEMS
Abstract:A novel monolithic off-shooter droplet generator has been demonstrated. The design, fabrication, bubble formation and droplet injection are described here. It is different from the conventional droplet generators of top-shooter, side-shooter and back-shooter for injection. The conventional inkjet chip needs complex alignment and bonding process to stick the nozzle plate and heating chip together. It takes long time, high cost and much lower alignment resolution. Some monolithic inkjet chips fabricated by the MEMS technology can improve the above drawbacks but suffer from the nozzle membrane broken during processes. In this paper, we report this droplet generator in combination of the advantages of conventional and monolithic inkjet technologies by changing the conventional inkjet heater shape from square into ring and integrating the electroforming and two photoresists (SU8 or JSR) technologies to form the strong metal or polymer nozzle plate. It avoids the membrane broken problem and simplifies process procedure with low cost and good droplet properties. It is potentially used for inkjet printing, LCD color filter dispersion, microarray for bio application and so on.
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