 | Nanotech 2004 Vol. 1
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 1
Chapter 8: MEMS Design and Application |
A MEMS Tunable Inductor | |
| Authors: | I. Zine-El-Abidine, M. Okoniewski and J.G. McRory |
| Affilation: | University of Calgary and TRLabs, CA |
| Pages: | 340 - 342 |
| Keywords: | radio frequency, MEMS, inductor, tunable |
| Abstract: | This paper reports a single-wafer micromachined radiofrequency (RF) inductor that can be integrated in a conventional RFIC device. The inductor achieved a quality factor greater than 9 at 5Ghz and a self-resonance frequency well above 15 GHz. The inductor is tunable and the inductance variation is greater than 8%. |
 | View PDF of paper |
| ISBN: | 0-9728422-7-6 |
| Pages: | 521 |
| Hardcopy: | $79.95 |
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