Nano Science and Technology Institute
Nanotech 2004 Vol. 1
Nanotech 2004 Vol. 1
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 1
Chapter 8: MEMS Design and Application

A MEMS Tunable Inductor

Authors:I. Zine-El-Abidine, M. Okoniewski and J.G. McRory
Affilation:University of Calgary and TRLabs, CA
Pages:340 - 342
Keywords:radio frequency, MEMS, inductor, tunable
Abstract:This paper reports a single-wafer micromachined radiofrequency (RF) inductor that can be integrated in a conventional RFIC device. The inductor achieved a quality factor greater than 9 at 5Ghz and a self-resonance frequency well above 15 GHz. The inductor is tunable and the inductance variation is greater than 8%.
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