Nanotech 2004 Vol. 1
Nanotech 2004 Vol. 1
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 1

MEMS Design and Application Chapter 8

A New Method to Design Pressure Sensor Diaphragm
X. Wang, B. Li, S. Lee, Y. Sun, H.T. Roman, K. Chin and K.R. Farmer
New Jersey Institute of Technology, US

Lattice Boltzmann Simulations Comparing Conventional and a Heat Conduction Based Flow-Through PCR Micro-Devices
T. Mautner
SPAWAR Systems Center San Diego, US

Geometrical Effects in Mechanical Characterizing of Microneedle for Biomedical Applications
P. Aggarwal and C. Johnston
University of Calgary, CA

Design and Manufacturing of a Miniaturized 2.45GHz Bulk Acoustic Filter by High Aspect Ratio Etching Process
C-H Lin, H-R Chen, C-H Du and W. Fang
National TsingHua University, TW

A MEMS Tunable Inductor
I. Zine-El-Abidine, M. Okoniewski and J.G. McRory
University of Calgary and TRLabs, CA

Design & Simulation of a Mechanical Amplifier for Inertial Sensing Applications
M.N. Kham, R. Houlihan and M. Kraft
Southampton University, UK

Micromachined Thermal Multimorph Actuators Fabricated by Bulk-etched MUMPs Process
A. Tuantranont and V.M. Bright
National Electronics and Computer Technology Center (NECTEC), TH

Micromachined Piezoresistive Tactile Sensor Array Fabricated by Bulk-etched MUMPs Process
A. Tuantranont, T. Lomas and V.M. Bright
National Electronics and Computer Technology Center (NECTEC), TH

Modelling and Fabrication of Microspring Thermal Actuator
J.K. Luo, A.J. Flewitt, M. Spearing, N.A. Fleck and W.I. Milne
University of Cambridge, UK

The Application of Parametric Excitation to a Micro-Ring Gyroscope
B.J. Gallacher, J.S. Burdess, A.J. Harris and J. Hedley
Insat University of Newcastle, UK

A Nanoscale Composite Material for Enhanced Damage Tolerance in MEMS Applications
A. Paranjpye, N.C. MacDonald and G.E. Beltz
University of California, Santa Barbara, US

Novel Monolithic Micro Droplet Generator
C.K. Chung, C.J. Lin, C.C. Chen, S.W. Chuang, Y.J. Fang and Y.Z. Hong
National Cheng Kung University, TW

A Novel Fabrication Technique of Cylindrical Ion Traps using Low Temperature Co-fired Ceramic Tapes
A. Chaudhary, F.H.W. van Amerom, S. Bhansali and R.T. Short
University of South Florida, US

Micromachined III-V Multimorph Actuator Model and Design using Simulated Annealing (SA)-Based Global Optimization
A. Ongkodjojo, F.E.H. Tay and R. Akkipeddi
Institute of Materials Research & Engineering, SG

Optimized Distributive u-Mixing by Chaotic Multilamination
F. Schönfeld, K.S. Drese, S. Hardt, V. Hessel and C. Hofmann
Institut für Mikrotechnik Mainz –(IMM), DE

Analysis of Micromachined PZT Membranes for MEMS Power
J.H. Cho, M.J. Anderson, R.F. Richards, D.F. Bahr, and C.D. Richards
Washington State University, US

Integrated High Frequency RF Inductors with Nano/micro Patterned Ferromagnetic Cores
Y. Zhuang, M. Vroubel, B. Rejaei and J.N. Burghartz
Delft University of Technology, NL

Two-Regime Hollow PDMS Abbe Prism for u-TAS Applications
A. Llobera, R. Wilke and S. Büttgenbach
Institut für Mikrotechnik, DE

Device Characterization at the Wafer Level via Optical Actuation and Detection
J. Hedley, J.S. Burdess, A.J. Harris and B.J. Gallacher
Newcastle University, UK

A MOEMS Electrothermal Grating
E.P. Furlani
Eastman Kodak Research Labs, US

Practical Techniques for Measuring MEMS Properties
J.V. Clark, D. Garmire, M. Last, J. Demmel and S. Govindjee
Berkeley Sensor and Actuator Center, US

Pumping Capacity and Reliability Study on Silicon-Based Cryogenic Micro Pump
Y. Zhao, B. Li, D. Ludlow and X. Zhang
Boston University, US


ISBN: 0-9728422-7-6
Pages: 521
Hardcopy: $79.95