 | Nanotech 2004 Vol. 1
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 1
Chapter 8: MEMS Design and Application |
| - | A New Method to Design Pressure Sensor Diaphragm |
| | X. Wang, B. Li, S. Lee, Y. Sun, H.T. Roman, K. Chin and K.R. Farmer |
| | New Jersey Institute of Technology, US |
| - | Lattice Boltzmann Simulations Comparing Conventional and a Heat Conduction Based Flow-Through PCR Micro-Devices |
| | T. Mautner |
| | SPAWAR Systems Center San Diego, US |
| - | Geometrical Effects in Mechanical Characterizing of Microneedle for Biomedical Applications |
| | P. Aggarwal and C. Johnston |
| | University of Calgary, CA |
| - | Design and Manufacturing of a Miniaturized 2.45GHz Bulk Acoustic Filter by High Aspect Ratio Etching Process |
| | C-H Lin, H-R Chen, C-H Du and W. Fang |
| | National TsingHua University, TW |
| - | A MEMS Tunable Inductor |
| | I. Zine-El-Abidine, M. Okoniewski and J.G. McRory |
| | University of Calgary and TRLabs, CA |
| - | Design & Simulation of a Mechanical Amplifier for Inertial Sensing Applications |
| | M.N. Kham, R. Houlihan and M. Kraft |
| | Southampton University, UK |
| - | Micromachined Thermal Multimorph Actuators Fabricated by Bulk-etched MUMPs Process |
| | A. Tuantranont and V.M. Bright |
| | National Electronics and Computer Technology Center (NECTEC), TH |
| - | Micromachined Piezoresistive Tactile Sensor Array Fabricated by Bulk-etched MUMPs Process |
| | A. Tuantranont, T. Lomas and V.M. Bright |
| | National Electronics and Computer Technology Center (NECTEC), TH |
| - | Modelling and Fabrication of Microspring Thermal Actuator |
| | J.K. Luo, A.J. Flewitt, M. Spearing, N.A. Fleck and W.I. Milne |
| | University of Cambridge, UK |
| - | The Application of Parametric Excitation to a Micro-Ring Gyroscope |
| | B.J. Gallacher, J.S. Burdess, A.J. Harris and J. Hedley |
| | Insat University of Newcastle, UK |
| - | A Nanoscale Composite Material for Enhanced Damage Tolerance in MEMS Applications |
| | A. Paranjpye, N.C. MacDonald and G.E. Beltz |
| | University of California, Santa Barbara, US |
| - | Novel Monolithic Micro Droplet Generator |
| | C.K. Chung, C.J. Lin, C.C. Chen, S.W. Chuang, Y.J. Fang and Y.Z. Hong |
| | National Cheng Kung University, TW |
| - | A Novel Fabrication Technique of Cylindrical Ion Traps using Low Temperature Co-fired Ceramic Tapes |
| | A. Chaudhary, F.H.W. van Amerom, S. Bhansali and R.T. Short |
| | University of South Florida, US |
| - | Micromachined III-V Multimorph Actuator Model and Design using Simulated Annealing (SA)-Based Global Optimization |
| | A. Ongkodjojo, F.E.H. Tay and R. Akkipeddi |
| | Institute of Materials Research & Engineering, SG |
| - | Optimized Distributive u-Mixing by Chaotic Multilamination |
| | F. Schönfeld, K.S. Drese, S. Hardt, V. Hessel and C. Hofmann |
| | Institut für Mikrotechnik Mainz –(IMM), DE |
| - | Analysis of Micromachined PZT Membranes for MEMS Power |
| | J.H. Cho, M.J. Anderson, R.F. Richards, D.F. Bahr, and C.D. Richards |
| | Washington State University, US |
| - | Integrated High Frequency RF Inductors with Nano/micro Patterned Ferromagnetic Cores |
| | Y. Zhuang, M. Vroubel, B. Rejaei and J.N. Burghartz |
| | Delft University of Technology, NL |
| - | Two-Regime Hollow PDMS Abbe Prism for u-TAS Applications |
| | A. Llobera, R. Wilke and S. Büttgenbach |
| | Institut für Mikrotechnik, DE |
| - | Device Characterization at the Wafer Level via Optical Actuation and Detection |
| | J. Hedley, J.S. Burdess, A.J. Harris and B.J. Gallacher |
| | Newcastle University, UK |
| - | A MOEMS Electrothermal Grating |
| | E.P. Furlani |
| | Eastman Kodak Research Labs, US |
| - | Practical Techniques for Measuring MEMS Properties |
| | J.V. Clark, D. Garmire, M. Last, J. Demmel and S. Govindjee |
| | Berkeley Sensor and Actuator Center, US |
| - | Pumping Capacity and Reliability Study on Silicon-Based Cryogenic Micro Pump |
| | Y. Zhao, B. Li, D. Ludlow and X. Zhang |
| | Boston University, US |
| ISBN: | 0-9728422-7-6 |
| Pages: | 521 |
| Hardcopy: | $150.00 |
| Special: | 3 CD Set — 15% off with Free Shipping |
| Order: | Mail/Fax Form |
| Up | |